Laser Beam Expander Layout for Uniform Beam Splitting
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Solution Overview
Problem
Existing laser irradiation systems struggle to provide a uniform laser beam width to a beam splitter, which affects the accuracy of the crystallization process for semiconductor layers.
Innovation Solution
A laser irradiation apparatus comprising a laser beam generator, a beam expander with a first and second lens, a beam splitter, and a beam condenser, where the lenses are arranged to expand and condense the laser beam, ensuring a corrected width is maintained regardless of the direction of the laser beam output.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a simple laser beam generator is used, then the device complexity is reduced, but the beam width uniformity deteriorates
Solution Approach 1:
A beam expander consisting of a first lens and a second lens is introduced as an intermediary component between the laser beam generator and the beam splitter. The beam expander corrects the beam width by expanding the laser beam in a first direction and controlling the beam width in a second direction, thereby achieving uniform beam width without significantly increasing overall system complexity
Solution Approach 2:
The beam expander changes the physical parameters of the laser beam by expanding it in the first direction while maintaining or controlling its width in the second direction. This parameter transformation ensures that the beam width is corrected and uniform when incident on the beam splitter, resolving the contradiction between simple device structure and precise beam uniformity
2Adaptability or versatility
If the laser beam direction is changed, then the adaptability is improved, but the beam width consistency deteriorates
Solution Approach 1:
The beam expander is designed with asymmetric lens configurations where the first lens has a first focal length and the second lens has a second focal length. This universal design allows the system to handle laser beams emitted in different directions while consistently correcting the beam width, making the apparatus adaptable to various beam directions while maintaining beam width consistency
Solution Approach 2:
The beam expander applies different optical properties to different parts of the beam path: the first lens expands the beam in the first direction, while the second lens controls the beam width in the second direction. This localized quality adjustment ensures that regardless of the input beam direction, the output beam width remains consistent when reaching the beam splitter
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus ensures that the laser beam has a corrected width when incident on the beam splitter, enhancing the accuracy of the crystallization process for semiconductor layers.
Implementation Method 1
a beam expander that expands the first laser beam and outputs the expanded first laser beam as a second laser beam. The beam expander may include a first lens having a first focal length and a second lens having a second focal length
Implementation Method 2
a beam splitter that splits the second laser beam into third laser beams and outputs the third laser beams
Implementation Method 3
a beam condenser that condenses the third laser beams and outputs condensed third laser beams
Data Source
AI summary
A laser irradiation apparatus includes a laser beam generator that generates a first laser beam, a beam expander that expands the first laser beam and outputs the expanded first laser beam as a second laser beam, a beam splitter that splits the second laser beam into third laser beams and outputs the third laser beams, and a beam condenser that condenses the third laser beams and outputs condensed third laser beams. The beam expander includes a first lens having a first focal length and a second lens having a second focal length. The first lens is disposed between the laser beam generator and the second lens, the second lens is disposed between the first lens and the beam splitter, and the laser beam generator is spaced apart from the first lens by the first focal length.