Laser Beam Feedback Control for Small-Structure Precision

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Solution Overview

Problem

Current laser processing technologies face challenges in achieving high accuracy and quality, particularly in processing small structures and maintaining precise control over laser beams, leading to deviations in structure size and quality.

Innovation Solution

A laser processing device equipped with an analysis device to analyze laser radiation and a control device to adjust parameters such as power, focus position, and beam path, allowing for independent control of each processing beam to ensure precise focusing and structure quality.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If multiple parallel laser beams are used for processing, then productivity is improved, but manufacturing precision deteriorates due to deviations in structure size and quality

Engineering Contradiction:

Improveprocessing throughputVSAvoidstructure size accuracy

Core Design Contradiction:

ProductivityVSManufacturing precision

Solution Approach 1:

The patent divides the laser processing system into multiple independent processing units, each with its own analysis device and control device. This segmentation allows each beam to be individually monitored and adjusted, maintaining precision while processing multiple structures simultaneously, thus resolving the contradiction between productivity improvement and precision maintenance

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent implements local quality control by assigning dedicated analysis and control devices to each laser beam. This allows individual adjustment of beam parameters (power, focus position, beam path) for each processing location, ensuring that each structure receives optimized processing conditions tailored to its specific requirements, thereby maintaining manufacturing precision across multiple processed structures

Inventive Principle:

Principle #3Local quality

2Ease of manufacture

If laser processing is used for small structures, then manufacturing capability is improved, but manufacturing precision deteriorates due to difficulty in maintaining accurate focus and beam control

Engineering Contradiction:

Improvecapability to process small structuresVSAvoidfocus accuracy

Core Design Contradiction:

Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent implements a feedback mechanism where the analysis device continuously monitors the laser radiation properties (power, focus position, beam path) and provides real-time data to the control device. The control device then adjusts the beam parameters based on this feedback, ensuring accurate focus and beam control for small structures, thus resolving the contradiction between manufacturing capability and precision

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The patent replaces manual mechanical adjustment of laser parameters with an automated control system that uses analysis device data to dynamically adjust beam properties. This substitution of mechanical control with automated feedback-based control enables precise focusing and beam management for small structures, overcoming the limitations of manual control and resolving the precision issue

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Data Source

PatentUS20230330773A1Laser processing device

Publication Date: 2023.10.19 4JET MICROTECH GMBH & CO KG

AI summary

Provided is a laser processing device for processing a workpiece with a processing beam formed by at least a portion of a provided laser radiation, the laser processing device comprising: an analysis device for analyzing a radiation, the radiation being based on the laser radiation; and a control device configured to adjust at least one parameter of the processing beam based on the analysis of the radiation.