Laser Beam Intensity Shaping for Precise Workpiece Processing
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Solution Overview
Problem
Current processing apparatuses using laser beams in machine tools face challenges in enhancing convenience and performance, particularly in achieving precise control over beam intensity distribution for effective workpiece processing.
Innovation Solution
A processing apparatus with a condensing optical system and a controller that allows for relative movement between the workpiece and the beam, enabling adjustable intensity distribution at specific planes, including the pupil plane and image plane, to optimize processing efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the beam intensity distribution is fixed, then the processing apparatus is simpler, but the processing precision and adaptability to different workpieces are reduced
Solution Approach 1:
The patent applies the dynamics principle by making the beam intensity distribution adjustable rather than fixed. The controller dynamically changes the intensity distribution at different planes (object plane and image plane) to match different processing requirements and workpiece characteristics, thereby improving processing precision without requiring multiple fixed systems
Solution Approach 2:
The patent implements parameter changes by varying the intensity distribution parameters of the beam at different planes. The controller modifies these parameters adaptively based on the specific processing task, allowing the same apparatus to achieve high precision across different workpieces and processing conditions without increasing physical complexity
2Adaptability or versatility
If the beam intensity distribution is adjustable at multiple planes, then the adaptability and processing efficiency are improved, but the device complexity increases
Solution Approach 1:
The patent applies universality by designing an optical system that can adjust intensity distribution at multiple planes (both object plane and image plane) using a unified controller. This multi-functional capability allows the same apparatus to handle various processing scenarios with different workpieces, achieving high adaptability without requiring separate specialized systems for each function
Solution Approach 2:
The patent replaces complex mechanical adjustments with electronic control. The controller electronically modulates the beam intensity distribution at different planes through optical modulation, eliminating the need for multiple mechanical adjustment mechanisms and reducing overall device complexity while maintaining high adaptability
3Productivity
If the beam and workpiece are relatively moved during processing, then the processing coverage and throughput are improved, but the positioning precision and processing stability are reduced
Solution Approach 1:
The patent implements feedback control by continuously monitoring the relative movement between the beam and workpiece during processing. The controller adjusts the beam intensity distribution and movement parameters in real-time based on this feedback, maintaining positioning precision even as throughput increases through relative motion
Solution Approach 2:
The patent applies dynamics by coordinating the relative movement of the beam and workpiece with dynamic adjustment of the intensity distribution. The system adapts the beam parameters in real-time during movement, allowing high-speed processing while maintaining precision through continuous optimization rather than relying on static positioning
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances processing precision and efficiency by allowing for customizable beam intensity distribution, improving the accuracy and throughput of workpiece processing tasks.
Implementation Method 1
a beam irradiation system including a condensing optical system to emit the beam
Data Source
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AI summary
A processing apparatus is equipped with: a first stage system that has a table (12) on which a workpiece (W) is placed and moves the workpiece held by the table; a beam irradiation system (500) that includes a condensing optical system (530) to emit beams (LB); and a controller to control the first stage system and the beam irradiation system, and processing is performed to a target portion of the workpiece while the table and the beams from the condensing optical system are relatively moved, and at least one of an intensity distribution of the beams at a first plane (MP) on an exit surface side of the condensing optical system and an intensity distribution of the beams at a second plane whose position in a direction of an optical axis (AX) of the condensing optical system is different from the first plane can be changed.