Laser Beam Inversion Optics for Symmetric Phase Homogenization
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Solution Overview
Problem
Existing optical systems for excimer laser annealing face challenges in maintaining light efficiency and beam alignment due to asymmetry in laser beam energy distribution, leading to crystallization defects in polycrystalline silicon layers.
Innovation Solution
An optical system comprising a splitter, reflection module, inversion module, and combiner that converts a laser beam into a homogenized beam by reflecting and transmitting portions of the beam through lenses and mirrors, ensuring symmetrical phase distribution and improved light efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If complex optical systems with multiple optical lenses are used to remove asymmetry of the source laser beam, then beam symmetry is improved, but light efficiency is lowered and device complexity increases
Solution Approach 1:
The optical system is divided into distinct functional modules: a beam combining unit that combines the source laser beam with a reference laser beam, and a homogenization unit that processes the combined beam. This segmentation allows each module to perform its specific function efficiently without requiring complex integrated systems with multiple lenses.
Solution Approach 2:
The beam combining unit serves multiple functions: it not only combines the source laser beam with the reference laser beam to correct asymmetry, but also provides beam alignment and phase reference. This multi-functionality reduces the need for separate dedicated components for each function, thereby simplifying the overall optical system.
2Stability of the object's composition
If complex optical systems with multiple optical lenses are used to remove asymmetry of the source laser beam, then beam symmetry is improved, but light efficiency is lowered
Solution Approach 1:
The source laser beam and reference laser beam are merged into a single combined beam through the beam combining unit. This merging process allows the system to utilize the reference beam to correct asymmetry in the source beam while maintaining high light efficiency, as the combined beam proceeds directly to the homogenization unit without requiring multiple intermediate lenses that would cause energy loss.
3Manufacturing precision
If multiple optical lenses are used to correct beam asymmetry, then beam alignment is improved, but beam alignment difficulty increases due to system complexity
Solution Approach 1:
The reference laser beam serves as a feedback mechanism for correcting asymmetry in the source laser beam. By combining the source beam with the reference beam that has a known symmetric profile, the system automatically corrects alignment issues without requiring complex manual adjustment mechanisms or multiple alignment lenses.
Solution Approach 2:
The reference laser beam acts as an intermediary that mediates the correction of asymmetry in the source laser beam. Instead of directly manipulating the source beam through multiple lenses, the system uses the reference beam as a mediator to impart symmetry, thereby simplifying the alignment process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The optical system achieves a more homogenized phase distribution and increased light efficiency, reducing crystallization defects and simplifying beam alignment, thereby enhancing the manufacturing process for display devices.
Implementation Method 1
a splitter configured to reflect a portion of a laser beam to form a reflected laser beam, and transmit a portion of the laser beam to form a transmitted laser beam
Implementation Method 2
a first lens having a first focal length and including a first incident surface and a first exit surface opposite to the first incident surface, and a second lens having a second focal length and including a second incident surface and a second exit surface opposite to the second incident surface, in which the transmitted laser beam passing through the splitter sequentially passes through the first lens and the second lens so that the transmitted laser beam is converted into an inverted laser beam
Implementation Method 3
a reflection module configured to reflect the reflected laser beam reflected from the splitter
Data Source
AI summary
An optical system includes: a splitter reflecting a portion of a laser beam to form a reflected laser beam, and transmitting a portion of the laser beam to form a transmitted laser beam; a reflection module reflecting the laser beam from the splitter; an inversion module including a first lens having a first focal length and a first incident surface and a first exit surface opposite to the first incident surface, and a second lens having a second focal length and including a second incident surface and a second exit surface opposite to the second incident surface, in which the laser beam sequentially passes through the first lens and the second lens so that the transmitted laser beam is converted into an inverted laser beam; and a combiner reflecting the laser beam reflected from the reflection module and transmitting the inverted laser beam emitted from the inversion module.