Laser Beam Machining Automatic Parameter Adjustment
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Solution Overview
Problem
The existing laser beam machining apparatus requires manual adjustment of the beam diameter and divergence angle, which is time-consuming and inefficient.
Innovation Solution
The apparatus includes a beam adjusting mechanism with movable lenses and detecting means, along with a control system that automatically adjusts and computes the beam diameter and divergence angle based on detection signals, allowing for automatic alignment of the laser beam.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manual adjustment of beam diameter and divergence angle is performed, then the laser beam parameters can be adjusted, but the adjustment process takes a long time
Solution Approach 1:
The system performs self-adjustment of beam parameters through automatic detection and control. The detection means measures the actual beam diameter and divergence angle, and the control means automatically adjusts the beam adjusting means to achieve the desired parameters, eliminating the need for manual operation and significantly reducing adjustment time
Solution Approach 2:
The system implements a closed-loop feedback control mechanism where the detection means continuously monitors the beam parameters after adjustment, and the control means uses this feedback information to compute and execute further adjustments if needed, ensuring accurate and rapid achievement of target parameters
2Productivity
If automatic beam parameter adjustment is implemented, then adjustment time is reduced, but device complexity increases
Solution Approach 1:
The detection means serves multiple functions: it detects the beam diameter, detects the divergence angle, and provides feedback for control. The control means also performs multiple functions including computing actual parameters, comparing with target values, and controlling the beam adjusting means. This multi-functionality reduces the need for separate dedicated components for each function
Solution Approach 2:
The beam adjusting means acts as an intermediary component between the laser beam oscillator and the workpiece. It includes adjustable elements that can modify beam parameters, and this intermediary structure allows for automated control while maintaining a relatively simple overall system architecture
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables rapid and precise automatic adjustment of the laser beam parameters, reducing setup time and improving machining efficiency during the semiconductor wafer cutting process.
Implementation Method 1
a condenser lens for condensing the laser beam oscillated by the laser beam oscillator
Implementation Method 2
a first lens and a second lens which are disposed on an optical path of the laser beam oscillated from the laser beam oscillator and are movable along the optical path
Implementation Method 3
A reflecting mirror by which the laser beam having passed through the beam adjusting means is reflected toward the condenser lens
Data Source
AI summary
A laser beam machining apparatus including a beam oscillator; a beam adjusting unit disposed between the beam oscillator and a condenser lens and by which the beam diameter and the divergence angle of the beam oscillated from the beam oscillator are adjusted; and a beam diameter and divergence angle detecting unit for detecting the beam diameter and the divergence angle of the beam having passed through the beam adjusting unit. The apparatus further includes a control unit which computes the beam diameter and the divergence angle of the beam, based on detection signals from the beam diameter and divergence angle detecting unit, and which controls the beam adjusting unit, based on the computed beam diameter and divergence angle of the beam and the beam diameter and the divergence angle of the laser beam incident on the beam diameter and divergence angle detecting unit.