Laser Beam Position Calibration Across Different Process Surfaces
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Solution Overview
Problem
Existing laser devices face challenges in accurately calibrating laser irradiation positions when the alignment mark is positioned on a surface different from the surface where the process is performed, making it difficult to achieve precise laser irradiation.
Innovation Solution
A laser device equipped with a beam corrector that includes a laser source, deflector, object lens, image capture device, and corrector, which captures images of scattered light and alignment marks to calculate and correct position errors, allowing for accurate laser irradiation even when the alignment mark is not on the same surface as the process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the alignment mark is positioned on a different surface from the surface where the laser process is performed, then the device can handle more complex multi-surface processing scenarios, but the accuracy of laser irradiation position decreases
Solution Approach 1:
The patent introduces scattered light from the laser beam as an intermediary reference that connects the alignment mark on one surface to the laser irradiation position on another surface. The object lens focuses this scattered light, and the image capture device detects it, creating an optical intermediary that bridges the spatial gap between different surfaces, thereby maintaining positioning accuracy across multi-surface processing.
Solution Approach 2:
The system captures images of the scattered light and alignment marks, calculates position errors by comparing their relative positions, and feeds this error information back to correct the laser irradiation position. This closed-loop feedback mechanism compensates for the positional discrepancy introduced by using alignment marks on different surfaces, thereby maintaining high precision.
2Manufacturing precision
If the alignment mark is positioned on the same surface as the laser process, then the laser irradiation position accuracy is high, but the device cannot process objects requiring alignment marks on different surfaces
Solution Approach 1:
The patent creates a universal positioning method that works regardless of whether the alignment mark and process surface are on the same or different surfaces. By using scattered light focusing and image-based position error calculation, the system achieves a unified approach that handles both single-surface and multi-surface scenarios, making the device adaptable to various processing configurations.
3Ease of manufacture
If a traditional calibration method using alignment marks on the same surface is used, then the setup is simple, but it fails when the process requires laser irradiation on a different surface
Solution Approach 1:
The scattered light acts as an optical intermediary that enables calibration between different surfaces. Instead of requiring direct line-of-sight alignment marks on the same surface, the scattered light from the laser beam itself serves as a movable reference that can be captured and used for position correction regardless of surface orientation or distance.
Solution Approach 2:
The patent replaces traditional mechanical alignment methods with an optical-based image capture and calculation system. Instead of physically adjusting components to achieve alignment, the system uses optical scattering, imaging, and computational error correction to achieve precise positioning across different surfaces.
4Adaptability or versatility
If the alignment mark is positioned on a different surface, then the device can perform laser processing on inaccessible surfaces, but the position error between alignment mark and laser beam increases
Solution Approach 1:
The system continuously captures images of the scattered light and alignment marks, calculates the position error between them, and uses this feedback to correct the laser beam position. This real-time measurement and correction loop compensates for the increased positional discrepancy that arises when using alignment marks on different surfaces.
Solution Approach 2:
The patent replaces mechanical alignment with optical scattering-based positioning. The scattered light from the laser beam itself becomes the reference, and its position is determined through optical focusing and image capture rather than mechanical alignment marks, enabling precise measurement even across different surfaces.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly increases the accuracy of laser irradiation by enabling precise correction of position errors, ensuring accurate placement of the laser beam on the intended surface, even when the alignment mark is on a different surface.
Implementation Method 1
an object lens that focuses scattered light of the laser beam that has been incident on the process object and then scattered
Implementation Method 2
an object lens that focuses scattered light of the laser beam
Implementation Method 3
a laser deflector that deflects the laser beam supplied from the laser source
Data Source
AI summary
Provided is a laser device. The laser device according to an embodiment comprises a laser source that provides a laser beam to a process object, a laser deflector that deflects the laser beam supplied from the laser source, an object lens that focuses scattered light of the laser beam that has been incident on the process object and then scattered, an image capture device that captures an image of the scattered light focused in the object lens, and a corrector that corrects a position of the laser beam by using the captured image.