Laser Beam Profile Measurement Near the Chuck Table
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Solution Overview
Problem
Existing laser processing apparatuses face challenges in measuring beam shape due to the incorporation of large-sized measuring instruments, making it difficult, time-consuming, and hazardous to align the laser beam with apparatus components without increasing the apparatus size.
Innovation Solution
A laser processing apparatus with a chuck table, a laser beam irradiating unit, a moving unit, a measuring unit adjacent to the chuck table, and a control unit that includes storage, comparison, and notification sections to safely and easily measure beam profiles without increasing the apparatus size, using a Z-axis direction moving unit to adjust the measuring unit's position.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a large-sized beam profiler is incorporated in the laser processing apparatus to measure beam shape, then measurement capability is improved, but apparatus size increases
Solution Approach 1:
The beam profiler is extracted from the main apparatus body and placed on a separate table, allowing measurement functionality to be retained while reducing the size of the laser processing apparatus itself. The profiler can be temporarily positioned for measurement without being permanently integrated into the apparatus structure.
Solution Approach 2:
The measurement function is moved from the horizontal plane (within apparatus) to a vertical arrangement where the beam profiler is positioned above or beside the apparatus on a table, utilizing the Z-axis dimension to resolve the space conflict.
2Volume of stationary object
If the beam profiler is temporarily mounted on a table outside the apparatus to avoid size increase, then apparatus size is suppressed, but measurement operation becomes difficult and time-consuming
Solution Approach 1:
A mirror is introduced as an intermediary component to redirect the laser beam onto the beam profiler. This simple optical element facilitates easy alignment by allowing the beam path to be redirected without complex mechanical adjustments, making the measurement process both simple and safe.
3Volume of stationary object
If the beam profiler is temporarily mounted on a table to measure beam shape, then apparatus size is suppressed, but safety risk increases due to difficult alignment work
Solution Approach 1:
The mirror serves as a safe intermediary that handles the laser beam redirection in a controlled manner. By using a properly positioned mirror, the beam path is safely directed onto the profiler without requiring operators to perform dangerous manual alignment work near the laser source.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables easy and safe beam shape measurement while preventing apparatus size increase, reducing downtime and costs by eliminating the need for beam alignment with mirrors and simplifying adjustments.
Implementation Method 1
a condenser configured to condense and apply a laser beam to the workpiece held on the chuck table
Implementation Method 2
a measuring unit configured to measure a beam profile of the laser beam, and a control unit configured to control each of the units, the measuring unit being disposed adjacent to the chuck table so as to have a light receiving surface parallel with the holding surface of the chuck table
Data Source
AI summary
A laser processing apparatus includes a chuck table configured to hold a workpiece, a laser beam irradiating unit having a condenser configured to condense and apply a laser beam to the workpiece held on the chuck table, a moving unit configured to move the chuck table and a condensing point of the laser beam relative to each other, a measuring unit configured to measure a beam profile of the laser beam; and a control unit configured to control each constituent element. The measuring unit is disposed adjacent to the chuck table so as to have a light receiving surface parallel with a holding surface of the chuck table.