Laser Beam Shaping at the Pupil Plane for Precise Workpiece Processing

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Solution Overview

Problem

Current machine tools using laser beams for processing lack the ability to efficiently change the intensity distribution of the beam across different planes, limiting their precision and effectiveness in processing workpieces.

Innovation Solution

A processing apparatus with a condensing optical system that allows for relative movement between the workpiece and the beam, enabling changes in the intensity distribution at various planes, including the pupil plane and image plane, to achieve precise processing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a conventional laser beam processing system is used, then the processing can be performed with a fixed intensity distribution, but the ability to change intensity distribution at different planes is limited

Engineering Contradiction:
Improveintensity distribution controlVSAvoidoptical system complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent applies dynamics by making the optical system adjustable and reconfigurable. Specifically, it uses movable optical elements (such as movable mirrors or lenses) that can change the beam path and focus position dynamically, allowing the intensity distribution to be modified at different planes without requiring multiple fixed optical systems. This enables the same optical system to adapt to different processing requirements by changing its configuration during operation.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent utilizes parameter changes by modifying key optical parameters such as focal length, beam convergence angle, and optical path length. By adjusting these parameters through movable optical components, the system can transform the beam intensity distribution from a fixed pattern to a variable one, enabling different processing modes (e.g., concentrated spot processing vs. line processing) using the same hardware platform.

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If the beam intensity distribution is fixed, then the optical system is simpler, but the processing precision and effectiveness are limited

Engineering Contradiction:
Improveprocessing accuracyVSAvoidoptical system complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent implements dynamic control of the beam intensity distribution through movable optical elements that can be positioned along the optical axis. This allows the system to optimize the intensity distribution for different processing precision requirements by adjusting the focus position and beam shape dynamically, thereby achieving high manufacturing precision without requiring multiple dedicated optical systems for different precision levels.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent creates a universal optical system that can perform multiple processing functions with varying intensity distributions. By incorporating adjustable optical components, a single optical system can achieve both concentrated spot processing for high-precision work and extended line processing for broader applications, eliminating the need for multiple specialized optical systems while maintaining high processing accuracy across different modes.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Productivity

If the workpiece and beam are stationary relative to each other, then the system is simpler, but processing efficiency is reduced

Engineering Contradiction:
Improveprocessing efficiencyVSAvoidsystem complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent applies dynamics by introducing relative motion between the workpiece and the beam through programmable moving mechanisms. The workpiece can be moved along the optical axis or laterally, and the beam focus can be dynamically adjusted to track the workpiece position. This dynamic coordination enables continuous processing of extended workpiece surfaces and allows for multi-pass processing with optimized intensity distribution at each pass, significantly improving productivity while using a single optical system.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent implements preliminary action by pre-programming the motion paths and timing of both the workpiece and the optical system components. Before actual processing begins, the system can pre-position the workpiece and pre-adjust the beam intensity distribution to optimal configurations, ensuring that when processing starts, everything is already optimized for maximum efficiency. This reduces idle time and ensures continuous productive operation throughout the processing cycle.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enhances the precision and effectiveness of processing by allowing for customizable beam intensity distribution, improving the accuracy and efficiency of operations such as cutting and removal processing on workpieces.

Implementation Method 1

a condensing optical system to emit the beam

Methodology Applied
Scientific EffectOptical focusing: Focusing

Data Source

PatentUS11691217B2Laser processing device with optical device for changing cross-sectional intensity distribution of a beam at a pupil plane
Publication Date: 2023.07.04 NIKON CORP
  • US11691217B2 patent drawing
  • US11691217B2 patent drawing
  • US11691217B2 patent drawing

AI summary

A processing apparatus is equipped with: a first stage system that has a table on which a workpiece is placed and moves the workpiece held by the table; a beam irradiation system that includes a condensing optical system to emit beams; and a controller to control the first stage system and the beam irradiation system, and processing is performed to a target portion of the workpiece while the table and the beams from the condensing optical system are relatively moved, and at least one of an intensity distribution of the beams at a first plane on an exit surface side of the condensing optical system and an intensity distribution of the beams at a second plane whose position in a direction of an optical axis of the condensing optical system is different from the first plane can be changed.