Laser Beam Shaping for Adjustable Fluence in Mask Projection
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Solution Overview
Problem
Current laser processing systems face inefficiencies in adjusting laser light radiation widths to optimize fluence and reduce energy waste, particularly in semiconductor exposure applications where precise control of radiation widths is necessary for effective processing.
Innovation Solution
The laser processing apparatus incorporates a beam shaping optical system with a zoom condenser lens that allows independent adjustment of radiation widths in the direction parallel to short and long edges of the irradiated region, enabling precise control of fluence without the need for attenuators, thereby improving processing efficiency and reducing energy waste.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional laser processing systems use fixed radiation widths, then the system structure remains simple, but the fluence control precision deteriorates and energy waste increases
Solution Approach 1:
The patent applies the dynamics principle by making the radiation width adjustable through a zoom condenser lens that can independently change the first and second radiation widths. This dynamic adjustment capability allows the system to optimize fluence control for different processing requirements while maintaining a relatively simple optical system structure without requiring multiple fixed systems.
2Manufacturing precision
If the radiation width is adjusted to optimize fluence, then the processing precision improves, but the device complexity increases due to additional optical components
Solution Approach 1:
The zoom condenser lens serves multiple functions: it shapes the laser beam, independently adjusts the first and second radiation widths, and enables fluence optimization. This multi-functionality allows the system to achieve high processing precision while avoiding the need for separate components for each function, thereby limiting the increase in device complexity.
3Measurement precision
If attenuators are used to control fluence, then the fluence can be adjusted, but energy waste increases
Solution Approach 1:
The patent replaces the mechanical attenuator system with an optical beam shaping system using a zoom condenser lens. Instead of mechanically reducing laser energy through attenuators (which waste energy), the system optically shapes the beam to achieve precise fluence control, thereby maintaining energy efficiency while achieving the same control precision.
4Productivity
If the radiation width is fixed, then the system operation is simple, but the processing speed and throughput deteriorate
Solution Approach 1:
The patent applies parameter changes by enabling dynamic adjustment of the first and second radiation widths through the zoom condenser lens. This allows the system to optimize processing parameters for different workpiece requirements, thereby improving processing speed and throughput while maintaining relatively simple operation through automated control of the radiation width parameters.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances processing speed and throughput by allowing for precise adjustment of radiation widths, reducing energy waste, and optimizing fluence, which is particularly beneficial in semiconductor exposure applications where precise control is critical.
Implementation Method 1
a laser light output unit configured to output laser light
Implementation Method 2
a beam shaping optical system configured to shape the laser light in such a way that a first irradiated region of a mask
Implementation Method 3
a projection optical system configured to project a pattern on the mask onto the workpiece placed on the placement base
Implementation Method 4
The excimer laser light having photon energy higher than the chemical binding energy of a polymer material can unbind the chemically bonded molecules that form the polymer material
Implementation Method 5
a mover configured to move the first irradiated region at least in the direction parallel to the short edges to move a second irradiated region of the workpiece
Data Source
AI summary
A laser processing apparatus includes a placement base on which a workpiece is placed, a beam shaping optical system that shapes laser light such that a first laser light irradiated region of a mask blocking part of the laser light has a rectangular shape having short edges and long edges, the beam shaping optical system capable of causing one of a first radiation width of the first irradiated region in the direction parallel to the short edges and a second radiation width of the first irradiated region in the direction parallel to the long edges to be fixed and causing the other to be changed, a projection optical system that projects a pattern on the mask onto the workpiece, and a mover that moves the first irradiated region at least in the direction parallel to the short edges to move a second laser light irradiated region of the workpiece.