Laser Beam Shaping for Multi-Line Processing Without Interference
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The miniaturization of functional elements on substrates leads to narrower intervals between processing lines, making it challenging to efficiently and accurately form modified regions along multiple lines without interference and quality deterioration in laser processing.
Innovation Solution
A laser processing apparatus with a spatial light modulator and moving parts that branch and converge laser light into multiple processing beams, allowing these beams to move along lines while being shifted in both X and Y directions to maintain sufficient distance and prevent interference, along with light blocking mechanisms to prevent damage from unwanted light.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple processing lines are used to improve efficiency, then productivity increases, but the interval between lines becomes narrower causing interference and quality deterioration
Solution Approach 1:
The patent applies dimensional change by shifting converging points not only in the Y-direction (parallel to processing lines) but also in the X-direction (perpendicular to processing lines). This two-dimensional shifting strategy increases the effective distance between converging points of adjacent processing lines, preventing interference while maintaining high productivity through multiple line processing
2Quantity of substance
If functional elements are miniaturized to increase density, then the number of elements increases, but the interval between processing lines becomes narrower
Solution Approach 1:
To accommodate miniaturized functional elements with narrower line intervals, the patent introduces X-direction shifting in addition to Y-direction shifting. This dimensional expansion of the shifting mechanism ensures sufficient separation between converging points even when the physical distance between processing lines is reduced due to miniaturization
3Productivity
If converging points are positioned close together to process narrow intervals, then processing density increases, but interference between beams occurs
Solution Approach 1:
The patent eliminates beam interference by adding X-direction shifting to the conventional Y-direction shifting. This creates a two-dimensional separation strategy that maintains adequate spacing between converging points even when processing dense patterns with narrow intervals, thereby preventing harmful beam interference while preserving high processing density
Solution Approach 2:
The patent introduces light blocking parts as intermediary elements positioned between processing lines. These blocking parts selectively obstruct stray light and unwanted diffraction orders, preventing interference between adjacent processing lines while allowing the desired processing beams to pass through and form modified regions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables efficient and accurate formation of modified regions along multiple lines, even with narrow intervals, by ensuring sufficient distance between converging points and blocking unwanted light, thus preventing processing quality deterioration.
Implementation Method 1
a spatial light modulator configured to modulate the laser light emitted from the light source
Implementation Method 2
a converging part configured to converge the laser light modulated by the spatial light modulator on the object from one side in a Z direction
Data Source
AI summary
A laser processing apparatus includes a support part, a light source, a spatial light modulator, a converging part, a moving part, and a control part. When a relative movement direction of a first converging point of first processing light and a second converging point of second processing light is set to an X direction, and a direction perpendicular to a Z direction and the X direction is set to a Y direction, the control part controls the spatial light modulator and the moving part such that the first converging point and the second converging point relatively move along a first line and a second line in the object in a state where the first converging point and the second converging point are shifted from each other in each of the X direction and the Y direction.