Laser Beam Shaping for Precise Workpiece Processing

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Solution Overview

Problem

Existing processing apparatuses using laser beams for machine tools face challenges in improving convenience and performance, particularly in efficiently processing workpieces by adjusting the beam intensity distribution.

Innovation Solution

A processing apparatus is designed with a first holding system, a beam irradiation system including a condensing optical system, and a controller. This apparatus allows for relative movement between the workpiece and the beam, enabling adjustment of the beam's intensity distribution at different planes along the optical axis, thereby optimizing processing efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the beam intensity distribution is adjusted at different planes, then processing precision is improved, but device complexity increases

Engineering Contradiction:
Improveprocessing precisionVSAvoiddevice complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent implements dynamic adjustment of beam intensity distribution by enabling independent control of intensity at different planes (first plane and second plane) along the optical axis. This allows the processing apparatus to adapt beam parameters in real-time during processing operations, improving precision while managing complexity through controlled dynamic adjustment rather than static fixed parameters.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent changes physical parameters of the beam by allowing independent modification of intensity distribution at different planes. The controller adjusts beam parameters (intensity at first plane and intensity at second plane) to optimize processing outcomes for different workpiece requirements, transforming fixed beam characteristics into variable adjustable parameters.

Inventive Principle:
Principle #35Parameter changes

2Productivity

If the beam intensity distribution is dynamically adjusted, then processing efficiency is improved, but control complexity increases

Engineering Contradiction:
Improveprocessing efficiencyVSAvoidcontrol complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The system employs dynamic control where the controller can adjust beam intensity at different planes during processing operations. This dynamic adjustment capability allows optimization of processing efficiency for different workpiece conditions while the controller manages the complexity of coordinating multiple adjustment parameters through centralized control logic.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The processing apparatus achieves multi-functionality by enabling the same beam irradiation system to perform different processing tasks through variable intensity distribution adjustment. The single apparatus can adapt to diverse processing requirements by modifying beam parameters, eliminating the need for multiple specialized devices and simplifying overall system control.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The apparatus achieves precise processing of workpieces by dynamically adjusting the beam intensity distribution, enhancing processing efficiency and accuracy, and improving the overall performance of machine tools.

Implementation Method 1

a beam irradiation system including a condensing optical system to emit the beam

Methodology Applied
Scientific EffectOptical focusing: Focusing

Data Source

PatentUS20250196259A1Processing apparatus and processing method
Publication Date: 2025.06.19 NIKON CORP
  • US20250196259A1 patent drawing
  • US20250196259A1 patent drawing
  • US20250196259A1 patent drawing

AI summary

A processing apparatus is equipped with: a first stage system that has a table on which a workpiece is placed and moves the workpiece held by the table; a beam irradiation system that includes a condensing optical system to emit beams; and a controller to control the first stage system and the beam irradiation system, and processing is performed to a target portion of the workpiece while the table and the beams from the condensing optical system are relatively moved, and at least one of an intensity distribution of the beams at a first plane on an exit surface side of the condensing optical system and an intensity distribution of the beams at a second plane whose position in a direction of an optical axis of the condensing optical system is different from the first plane can be changed.