Laser Beam Splitter Before Frequency Converter
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing inspection systems face challenges with high power ultraviolet (UV) and deep UV (DUV) applications due to the potential for damage to scanning optics, leading to reliability and lifetime issues with current laser sources, particularly in AOD scanners where limited optical efficiency requires high power UV light sources.
Innovation Solution
The integration of a scanner within the laser source before the frequency converter, allowing for beam splitting or scanning prior to frequency conversion, which reduces the fluence on the frequency converting crystal and extends its lifetime by distributing the power across multiple spots or lines, thereby reducing the risk of damage and increasing efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a high power UV light source is used to compensate for the limited optical efficiency of an AOD scanner, then the scanning system can fulfill the sensitivity requirement, but the life time and reliability of the light source and scanning optics deteriorate due to damage potential
Solution Approach 1:
The patent divides the single high-power beam into multiple parallel beams using a beam splitter. This segmentation allows the optical power to be distributed across multiple frequency converter crystals, reducing the fluence on each individual crystal and preventing damage while maintaining the required scanning sensitivity.
Solution Approach 2:
The patent introduces a beam scanner positioned before the frequency converter as an intermediary component. This scanner creates multiple parallel beams that are then converted to UV wavelengths, acting as a mediator that protects the frequency converter crystals from direct exposure to concentrated high-power UV energy while still delivering the required scanning capability.
2Ease of operation
If a fixed spot design is used where the source spot is focused on an oversized crystal, then the system is simple to operate, but the crystal degrades quickly and requires frequent shifting to fresh areas
Solution Approach 1:
Instead of focusing all power on a single fixed spot, the patent segments the beam into multiple parallel beams that are distributed across the crystal surface. This segmentation allows the crystal to be used more uniformly over time, extending its operational lifetime without requiring frequent shifting to fresh areas.
Solution Approach 2:
The patent introduces a dynamic scanning mechanism that moves the beam pattern across the crystal surface before frequency conversion. This dynamic approach distributes the thermal and optical stress across multiple locations on the crystal, preventing localized degradation and extending the crystal's usable life.
3Adaptability or versatility
If beam splitting or scanning is performed after frequency conversion, then the UV beam can be directed to multiple locations, but the optical losses increase and the system complexity increases
Solution Approach 1:
The patent performs beam splitting and scanning actions before the frequency conversion process. By doing the beam manipulation in the visible wavelength range first, the system avoids the high optical losses that would occur if similar operations were performed after UV conversion, since UV optics have higher absorption and the available power is lower.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the life and reliability of the frequency converting crystal, reduces the power requirements for UV and DUV applications, and makes the system more cost-effective by minimizing optical losses and complexity, allowing for higher power output with lower input power and extended crystal usage.
Implementation Method 1
a beam splitter configured for directly receiving the laser from the laser source and splitting the laser into a plurality of parallel beams
Implementation Method 2
a frequency converter configured for receiving the plurality of parallel beams and converting the frequency of each of the plurality of parallel beams
Implementation Method 3
The scanner is positioned in an optical path between the laser source and the frequency converter, wherein the scanner is configured for providing beam scanning prior to frequency conversion
Data Source
AI summary
A method and system for providing illumination is disclosed. The method may include providing a laser having a predetermined wavelength; performing at least one of: beam splitting or beam scanning prior to a frequency conversion; converting a frequency of each output beam of the at least one of: beam splitting or beam scanning; and providing the frequency converted output beam for illumination.