Laser Beam Inspection Using Threshold Rings for Distortion Detection

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current M2 measurement methods lack sufficient resolution to detect subtle distortions in the Gaussian distribution of laser beams, rendering them unreliable for assessing the accuracy of laser oscillators in laser processing apparatuses.

Innovation Solution

An inspection apparatus and method that includes a dimming plate, an imaging unit with multiple pixels, processing means to analyze the dimmed laser beam, and a display unit to show the processed image with inner, intermediate, and outer rings, allowing for precise calculation and display of deviation between ring centers, thereby assessing the beam's accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If M2 measurement is used to observe the spot shape condensed by a beam condenser, then the measurement can be performed, but the resolution is insufficient to detect subtle distortions in the Gaussian distribution of the laser beam

Engineering Contradiction:
Improvedetection accuracy of equal beamVSAvoidsubtle distortion detection
Core Design Contradiction:
Measurement precisionVSDifficulty of detecting and measuring

Solution Approach 1:

The patent divides the laser beam intensity distribution into multiple concentric rings (inner ring, intermediate ring, outer ring) with different thresholds. This segmentation allows for precise measurement of the equal beam by analyzing the center positions of each ring, thereby detecting subtle distortions in the Gaussian distribution that would be invisible in conventional spot shape observations.

Inventive Principle:
Principle #1Segmentation

2Reliability

If conventional M2 measurement is performed, then the spot shape can be observed, but the accuracy is only for reference and lacks reliability

Engineering Contradiction:
Improveinspection reliabilityVSAvoidequal beam detection accuracy
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The patent transitions from observing the two-dimensional spot shape to measuring the one-dimensional equal beam distribution by introducing multiple threshold rings. This dimensional transformation enables reliable detection of Gaussian distribution characteristics, as the center positions and widths of the concentric rings provide quantitative metrics for assessing beam quality and distortion.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables high-accuracy detection of the Gaussian distribution of laser beams, ensuring reliable inspection and determination of the laser oscillator's accuracy by displaying the deviation between ring centers, thus improving the reliability of laser processing.

Implementation Method 1

a dimming plate that dims a laser beam immediately after the laser beam is emitted from the laser oscillator

Methodology Applied
Scientific EffectAbsorption (EM radiation): Absorption (EM radiation)

Implementation Method 2

an imaging unit that images, with a plurality of pixels, the laser beam dimmed by the dimming plate

Methodology Applied
Scientific EffectPhotoelectric Effect: Photoelectric Effect

Data Source

PatentUS11933667B2Inspection apparatus and inspection method
Publication Date: 2024.03.19 DISCO CORP
  • US11933667B2 patent drawing
  • US11933667B2 patent drawing
  • US11933667B2 patent drawing

AI summary

An inspection apparatus for a laser oscillator includes a dimming plate that dims a laser beam immediately after the laser beam is emitted from the laser oscillator; an imaging unit that images, with a plurality of pixels, the laser beam dimmed by the dimming plate; a processing unit that processes an image captured by the imaging unit; and a display unit that displays the image processed by the processing unit. The processing unit has at least two thresholds of an inner ring and an outer ring used for partitioning the intensity of the laser beam.