Laser Unit Blocking Part Stabilizes Flat Panel Display SLS Crystallization
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Solution Overview
Problem
The sequential lateral solidification (SLS) system for crystallizing amorphous silicon in flat panel displays faces issues with laser beam focus instability due to air currents, leading to inconsistent depth of focus and difficulties in precisely defining the melted region, resulting in device rejection.
Innovation Solution
A system is introduced that includes a blocking part with a hollow body maintaining a vacuum or filled with inert gas between the mask and reducing lens to prevent external air currents, and an air current guider on the stage to minimize air flow, ensuring stable laser beam focus and increased depth of focus.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the laser beam is focused between the mask and reducing lens, then the resolution is increased, but the depth of focus decreases and becomes difficult to maintain due to air currents
Solution Approach 1:
A blocking part (housing structure) is introduced as an intermediary element between the mask and reducing lens to shield the laser beam path from air currents. This mediator protects the focused laser beam while maintaining the high resolution configuration, allowing both improved resolution and maintained depth of focus.
Solution Approach 2:
The blocking part creates a protected environment (effectively an inert atmosphere relative to air currents) between the mask and reducing lens. By excluding external air flow from this critical region, the system maintains stable focusing conditions without requiring reduction of the depth of focus.
2Productivity
If the stage moves during laser irradiation, then productivity is improved, but air currents are generated that shake the laser beam focus
Solution Approach 1:
The blocking part serves as a mediator that isolates the laser beam path from the air currents generated by stage movement. This allows the stage to move at productive speeds while the housing structure prevents these movements from disturbing the laser focus.
Solution Approach 2:
The system acknowledges that stage movement is necessary for productivity but converts the harmful effect (air currents) into a manageable condition by using the blocking part to contain or redirect the air flow away from the critical laser path.
3Ease of operation
If the air bearing is used for stage movement, then ease of operation is improved, but air currents are generated that affect laser beam stability
Solution Approach 1:
The blocking part acts as an intermediary barrier between the air bearing's air current output and the laser beam path. This mediator allows the air bearing to continue providing smooth stage movement while preventing the generated air currents from disturbing the laser focus.
Solution Approach 2:
The blocking part applies local quality control by creating a protected zone specifically around the laser path, while allowing air currents to exist in other regions where they do not interfere with the critical focusing process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution stabilizes the laser beam focus, increases the depth of focus, and allows for precise control of the melted region of amorphous silicon, reducing device rejection and improving manufacturing efficiency.
Implementation Method 1
maintaining a vacuum or filled with inert gas between the mask and reducing lens
Implementation Method 2
maintaining a vacuum or filled with inert gas between the mask and reducing lens
Implementation Method 3
a laser source for generating a laser beam
Implementation Method 4
a reducing lens for reducing the passed laser beam to a predetermined focus
Implementation Method 5
crystallizing the a-Si of the lower display panel
Implementation Method 6
an air bearing disposed between the rail and the guider
Data Source
AI summary
A system for manufacturing a flat panel display is provided including a display panel moving unit, and a laser unit for generating a laser beam, wherein the laser unit comprises a mask for selectively passing the laser beam, a reducing lens for reducing the laser beam having passed the mask, and a blocking part for substantially preventing an external air current from flowing into a space between the mask and the reducing lens where a focus of the laser beam is formed.