Laser Bonding Sealing Material Inner-Outer Irradiation Sequence
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Solution Overview
Problem
The method of producing hermetically sealed packages by bonding substrates faces challenges due to shrinkage of sealing materials during laser irradiation, leading to misalignment and defects in the bonded portions.
Innovation Solution
A method involving a lamination step where sealing materials are arranged in a predetermined array pattern between substrates, followed by a bonding step with a two-stage laser irradiation process. The first stage irradiates sealing materials closer to the center, and the second stage irradiates those on the outer edges, reducing misalignment and defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple sealing materials are sequentially irradiated with a laser beam from outermost to innermost positions, then the bonding process can be completed systematically, but shrinkage of sealing materials causes misalignment between substrates and sealing materials
Solution Approach 1:
The patent inverts the conventional sequential irradiation order by irradiating the innermost sealing material first, then moving outward to the outermost sealing materials. This reverse sequence prevents the misalignment problem caused by shrinkage, as inner materials are fixed before outer materials are processed, eliminating the need for complex realignment mechanisms while maintaining systematic bonding completion.
2Loss of time
If sealing materials are irradiated in arbitrary order, then processing time may be reduced, but defects occur in bonded portions due to misalignment
Solution Approach 1:
The patent applies preliminary action by first irradiating and bonding the innermost sealing material before processing outer materials. This preliminary bonding of inner materials creates a stable reference structure that prevents subsequent misalignment, ensuring high reliability of bonded portions while maintaining efficient processing through the systematic inner-to-outer sequence.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively reduces the occurrence of defects in the bonded portions by minimizing misalignment caused by shrinkage, resulting in higher quality hermetically sealed packages.
Implementation Method 1
the glass frits are irradiated with a laser beam to form sealing layers
Implementation Method 2
The sealing material shrinks when heated with a laser beam
Data Source
AI summary
A bonding step in a method of producing a bonded body includes a first bonding step of forming a sealing layer (4) by irradiating a sealing material (6) belonging to an inner group (IG) with a laser beam (L), and a second bonding step of forming a sealing layer (4) by irradiating a sealing material (6) belonging to an outer group (OG) with the laser beam (L) after the first bonding step.


