Laser Bubble Removal in OLED Thin-Film Transistors

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Solution Overview

Problem

Bubbles formed during the manufacturing process of thin-film transistors in organic light-emitting display apparatuses can disrupt the functionality of the devices, necessitating an effective method for their removal.

Innovation Solution

A method involving the use of a laser to irradiate bubbles in a cross direction, specifically along the minimum diameter and then perpendicular to it, to effectively burst and remove bubbles from the active and insulating layers, thereby ensuring the proper functioning of the thin-film transistor.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If thermal treatment is performed to activate portions of the active layer or remove hydrogen, then the functionality of the thin-film transistor is improved, but bubbles occur in the active layer or insulating layers

Engineering Contradiction:
Improvefunctionality of thin-film transistorVSAvoidbubbles in active layer or insulating layer
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent applies preliminary action by detecting bubbles before they cause device failure and removing them proactively. The inspection process identifies bubbles in the active layer or insulating layers before final device operation, allowing preventive removal through laser irradiation rather than waiting for functional degradation

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent converts the harmful effect of bubbles into a beneficial detection opportunity. By using inspection methods to identify bubbles, the previously hidden defect becomes visible and actionable. The laser irradiation then converts the harmful bubble presence into a beneficial outcome by selectively removing bubbles while preserving the functional layers

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

2Reliability

If laser irradiation is applied to remove bubbles, then device reliability is improved, but additional process steps and complexity are introduced

Engineering Contradiction:
Improvedevice lifetime and performanceVSAvoidmanufacturing process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent introduces an intermediary inspection process that bridges the thermal treatment step and final device operation. This intermediary step detects bubbles and targets them for selective laser removal, acting as a mediator between the process that creates bubbles and the final device performance, adding controlled complexity only where needed

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent applies local quality by using targeted laser irradiation only at specific locations where bubbles are detected, rather than applying uniform treatment across the entire device. The laser parameters (power, duration, scanning speed) are locally optimized based on bubble characteristics, adding minimal complexity only to affected areas

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly improves the lifetime and reliability of the organic light-emitting display apparatus by ensuring the removal of bubbles, which could otherwise impair the device's performance.

Implementation Method 1

removing a bubble that occurs on the thin-film transistor, by using a laser, wherein, when the bubble is removed, the laser is irradiated to the bubble in a cross direction

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Data Source

PatentUS9230869B2Flexible organic light-emitting display apparatus and method of manufacturing the same
Publication Date: 2016.01.05 SAMSUNG DISPLAY CO LTD
  • US9230869B2 patent drawing
  • US9230869B2 patent drawing
  • US9230869B2 patent drawing

AI summary

A method of manufacturing an organic light-emitting display apparatus, the method including removing a bubble by irradiating a laser in a cross direction to the bubble that occurs in a thin-film transistor.