Laser-Created Ceramic Chuck Features for Crack-Free Refurbishment
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Solution Overview
Problem
Conventional methods for forming features on ceramic plates of substrate supports, such as bead blasting and mechanical grinding, lack precision, leading to cracks, material flaking, and uneven thermal management, which compromise the performance and reliability of electrostatic chucks in semiconductor manufacturing.
Innovation Solution
Laser material processing is used to create and refine feature patterns on ceramic plates, enabling precise formation and removal of features, reducing cracking and improving thermal management, while allowing for more refurbishment cycles.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional methods (bead blasting, mechanical grinding) are used to form features on ceramic plates, then manufacturing simplicity is maintained, but manufacturing precision deteriorates leading to cracks and material flaking
Solution Approach 1:
The patent replaces mechanical processing methods (bead blasting, mechanical grinding) with laser material processing. The laser system uses optical energy to selectively remove material and form features on ceramic plates without mechanical contact, thereby achieving higher precision while avoiding the cracks and flaking caused by mechanical stress.
Solution Approach 2:
The patent utilizes the ability to precisely control laser parameters (power, pulse duration, scanning speed, wavelength) to optimize feature formation. By adjusting these parameters, the process achieves high manufacturing precision for different feature types and material conditions without requiring complex mechanical tooling changes.
2Reliability
If conventional mechanical methods are used for feature formation, then equipment simplicity is maintained, but reliability deteriorates due to cracks and uneven thermal management
Solution Approach 1:
The laser processing system replaces mechanical processing to eliminate cracks and material flaking that compromise reliability. The non-contact nature of laser processing preserves the integrity of the ceramic plate and ensures uniform thermal management surfaces, directly improving electrostatic chuck reliability.
Solution Approach 2:
The patent incorporates feedback mechanisms where processing parameters are adjusted based on real-time monitoring of the laser-material interaction. This ensures consistent feature quality and reliability across production batches, maintaining high reliability standards while managing system complexity through automated control.
3Duration of action of stationary object
If extensive material removal is performed during refurbishment, then feature restoration is achieved, but operational lifespan deteriorates due to reduced ceramic plate thickness
Solution Approach 1:
Laser material processing enables precise feature restoration during refurbishment by selectively removing only the damaged surface layer without affecting the underlying bulk material. This minimizes material removal while achieving complete feature restoration, thereby extending the operational lifespan of the substrate support.
Solution Approach 2:
The laser processing system applies energy locally to only the areas requiring refurbishment. This localized processing restores features precisely where needed while preserving the rest of the ceramic plate structure, maximizing the remaining material thickness and extending operational lifespan.
4Manufacturing precision
If conventional processing methods are used, then process simplicity is maintained, but manufacturing precision deteriorates leading to debris accumulation
Solution Approach 1:
Laser material processing replaces mechanical methods to eliminate debris generation. The laser vaporizes or melts material in a controlled manner, and the energy input can be tuned to minimize particulate formation. This significantly reduces debris accumulation compared to mechanical bead blasting or grinding operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances precision in feature creation, reduces cracking and debris accumulation, maintains electrostatic properties, and extends the operational lifespan of substrate supports by minimizing material removal during refurbishment.
Implementation Method 1
performing laser material processing of the surface of the ceramic plate to form the feature pattern comprising a plurality of features on the surface of the ceramic plate
Data Source
AI summary
A method includes receiving a ceramic plate of a substrate support system. The method further includes determining a feature pattern for a surface of the ceramic plate. The method further includes performing laser material processing of the surface of the ceramic plate to form the feature pattern comprising a plurality of features on the surface of the ceramic plate.