Gas Laser Chamber Baking via Cooling Passage Heat Transfer

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Solution Overview

Problem

The existing methods for baking the chamber of gas laser apparatuses are inefficient, leading to prolonged baking periods due to gaps between the chamber and the mantle heater, which hinder effective heat transfer and result in prolonged heating times.

Innovation Solution

A method involving a cooling passage between the inner and outer housings of the chamber, where a heating medium flows through to heat the internal space directly, and an exhaust step to remove desorbed moisture, allowing for simultaneous heating and gas removal, thereby shortening the baking period.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If a mantle heater is used to heat the chamber from the outside, then the chamber can be heated, but the heating efficiency is low due to gaps between the heater and chamber wall

Engineering Contradiction:
Improveinternal space temperatureVSAvoidbaking time
Core Design Contradiction:
TemperatureVSLoss of time

Solution Approach 1:

The patent introduces a cooling passage as an intermediary heat transfer medium between the heating source and the internal space. The cooling passage fills the gap between the chamber wall and external heater, enabling efficient thermal contact and rapid heat transfer to the internal space, thereby reducing baking time while maintaining heating effectiveness

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If the chamber is heated to remove moisture, then moisture can be desorbed, but the process takes a long time with conventional heating methods

Engineering Contradiction:
Improvemoisture removal effectivenessVSAvoidheating time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The patent utilizes the cooling passage, originally designed for fluid flow, to serve as a heating medium conduit. By circulating heating fluid through the cooling passage that is in thermal contact with the chamber wall, the system achieves rapid and uniform heating of the internal space, efficiently desorbing moisture in a shorter time while ensuring thorough moisture removal for reliable operation

Inventive Principle:
Principle #29Pneumatics and hydraulics

3Temperature

If external baking facilities are used to heat the chamber, then the chamber can be baked, but additional equipment and space are required

Engineering Contradiction:
Improvechamber temperatureVSAvoidbaking facility requirements
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The patent repurposes the existing cooling passage, originally designed for cooling the chamber during operation, to serve dual functions: cooling during laser operation and heating during the baking process. This multi-functionality eliminates the need for separate external baking facilities, reducing device complexity and space requirements while maintaining effective heating capability

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables faster heating of the internal space, reduces the baking time, and eliminates the need for external baking facilities, while maintaining the structural integrity and reliability of the gas laser apparatus.

Implementation Method 1

a heating step of heating the internal space via the wall surface by making a heating medium flow through the cooling passage

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

a cooling passage configured to make a cooling medium that cools the chamber flow on an outer side of a wall surface

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS20240399510A1Method of baking chamber of gas laser apparatus and electronic device manufacturing method
Publication Date: 2024.12.05 GIGAPHOTON INC
  • US20240399510A1 patent drawing
  • US20240399510A1 patent drawing
  • US20240399510A1 patent drawing

AI summary

A method of baking a chamber of a gas laser apparatus provided with a cooling passage configured to make a cooling medium that cools the chamber flow on an outer side of a wall surface in contact with an internal space of the chamber for generating light in the internal space includes a heating step of heating the internal space via the wall surface by making a heating medium flow through the cooling passage before generating the light in the internal space, and an exhaust step of exhausting a gas in the heated internal space to an external space of the chamber.