Laser Chamber Support Decoupling Vibration Isolation
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Solution Overview
Problem
High pulse repetition rate line narrowed gas discharge laser systems face challenges in maintaining beam quality due to vibration-induced variations in the optical train, particularly affecting the output coupler and line narrowing unit, which impact pulse-to-pulse stability and energy integral.
Innovation Solution
A gas discharge laser chamber support structure with independent optical element mounts, using a wheel and track arrangement to position the chamber along the optical axis, and alignment rods to secure optical elements to the mounting table without direct connection to the chamber support arms, isolating vibrations and maintaining alignment without physical contact.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the optical elements are directly mounted on the chamber support structure, then the alignment and positioning are simplified, but vibration from the chamber is transmitted to the optical elements causing beam quality degradation
Solution Approach 1:
The mounting system is divided into separate components: the chamber support structure and the optical element mounts are physically decoupled. The chamber support arms do not directly connect to the optical elements, creating independent vibration zones while maintaining optical alignment through separate mounting brackets and positioning mechanisms.
Solution Approach 2:
Independent mounting brackets and positioning mechanisms serve as intermediaries between the chamber support structure and the optical elements. These intermediaries allow for precise alignment and positioning of optical elements without creating direct vibration transmission paths from the chamber to the sensitive optical components.
2Stability of the object's composition
If the chamber is rigidly fixed to prevent movement, then positioning stability is improved, but vibration is transmitted to optical elements mounted on the chamber
Solution Approach 1:
The system segments the support function from the mounting function. The chamber support arms provide stable positioning of the chamber, while separate independent mounts handle the optical elements. This segmentation prevents vibration transmission while maintaining both chamber stability and optical element stability through decoupled support structures.
3Ease of operation
If the optical elements are mounted on moving parts of the chamber, then alignment adjustment is easier, but vibration-induced variations in beam quality increase
Solution Approach 1:
Independent mounting brackets with adjustment mechanisms serve as intermediaries that allow for precise alignment of optical elements without coupling them to chamber vibrations. The adjustment capability is maintained through these intermediary mounts while the physical decoupling prevents vibration transmission that would degrade beam quality consistency.
Data Source
AI summary
A gas discharge laser and method of operating same is disclosed which may comprise a gas discharge laser chamber support structure comprising a first support arm attached to a mounting table; a gas discharge laser chamber slideably engaging the first support arm; an first optical element sensitive to chamber vibration positioned at a first end of the laser chamber mounted on the mounting table; the laser chamber support structure being without connection to the first optical element. The apparatus and method may also comprise a second optical element sensitive to chamber vibration positioned at the second end of the laser chamber mounted on the mounting table; the laser chamber support structure being without connection to the second optical element. The first optical element may comprise a line narrowing optical arrangement and the second optical element comprising an output coupler.