Laser Chamber Vortex Division for Stable Excimer Gas Flow
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Solution Overview
Problem
Chromatic aberration in projection lenses due to large spectral line widths of KrF and ArF excimer laser devices leads to reduced resolution, necessitating line narrowing modules, but these systems face issues with unstable laser gas flow and energy stability.
Innovation Solution
A gas laser device with a vortex dividing member in the laser chamber to stabilize laser gas flow and reduce acoustic wave reflection, enhancing discharge stability and energy consistency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a line narrowing module is provided in the laser resonator to narrow spectral line width, then chromatic aberration is reduced, but laser gas flow instability and energy instability occur
Solution Approach 1:
The patent divides the laser chamber into multiple discharge spaces separated by insulating guides, creating distinct flow channels. This segmentation prevents vortex interaction and stabilizes laser gas flow, allowing the line narrowing module to function effectively without causing flow instability
Solution Approach 2:
The patent introduces insulating guides as intermediary structures between discharge spaces. These guides serve as flow separators that prevent vortex generation and stabilize gas flow, enabling the line narrowing module to operate without inducing flow instability
2Reliability
If laser gas flow rate is increased to improve discharge stability, then energy consistency improves, but vortex generation increases causing flow instability
Solution Approach 1:
The laser chamber is divided into multiple discharge spaces with insulating guides creating separate flow channels. This segmentation prevents vortex generation even at high flow rates, maintaining both discharge stability and flow stability simultaneously
Solution Approach 2:
The patent creates different flow conditions in different regions by dividing the chamber into discrete discharge spaces. Each space has controlled flow characteristics that prevent vortex formation while maintaining high flow rates for stable discharge
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Improves laser gas flow rate and discharge stability, leading to more consistent pulse laser output and reduced chromatic aberration effects.
Implementation Method 1
a fan configured to cause the laser gas to flow through a discharge space between the first electrode and the second electrode
Implementation Method 2
a vortex dividing member including a plurality of structures extending in the first direction and arranged discretely along a direction in which the laser gas flows on a downstream side of the insulating guide, and configured to divide a vortex generated by a part of a flow of the laser gas
Implementation Method 3
a discharge space between the first electrode and the second electrode
Data Source
AI summary
A laser chamber of a gas laser device outputting laser light including a container filled with a laser gas; a first electrode extending in a first direction and arranged in the container; a second electrode arranged at a position closer to an inner wall of the container than the first electrode while extending in the first direction and facing the first electrode in a second direction orthogonal to the first direction; a fan causing the laser gas to flow through a discharge space between the first and second electrodes; an insulating guide arranged on a downstream side of the second electrode; and a vortex dividing member including structures extending in the first direction and arranged discretely along a direction in which the laser gas flows on a downstream side of the insulating guide, and dividing a vortex generated by a part of a flow of the laser gas.