Laser Controller Backup Logic for Capacitor Deterioration Detection
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Solution Overview
Problem
Chromatic aberration in projection lenses due to the large spectral line width of KrF and ArF excimer laser devices used in semiconductor exposure, leading to decreased resolution, necessitates a line narrowing module which can increase device size and cost.
Innovation Solution
A controller with a processor, volatile memory, nonvolatile memory, and capacitor is used to store laser device parameters and duration time of power supply, allowing for capacitor deterioration determination without additional measurement mechanisms.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a line narrowing module is provided in the laser resonator to narrow the spectral line width, then chromatic aberration is reduced and resolution is improved, but the device size and cost increase
Solution Approach 1:
The patent extracts the line narrowing function from the optical path of the laser device and implements it through software processing of laser light intensity data. Instead of adding physical line narrowing elements to the laser resonator, the invention processes the spectral characteristics computationally, thereby eliminating the need for additional optical components that would increase device size and complexity.
2Manufacturing precision
If a line narrowing module is provided in the laser resonator to narrow the spectral line width, then chromatic aberration is reduced and resolution is improved, but the cost increases
Solution Approach 1:
The patent replaces the mechanical/optical line narrowing module with a computational system that processes laser light intensity data. By substituting physical line narrowing elements with software-based spectral analysis and processing, the invention eliminates the cost associated with manufacturing, installing, and maintaining additional optical components while achieving the same resolution improvement through digital signal processing.
3Speed
If volatile memory is used to store laser device parameters, then fast access is achieved, but data loss occurs when power supply is stopped
Solution Approach 1:
The patent implements preliminary action by automatically transferring data from volatile memory to non-volatile memory before power supply is completely interrupted. The controller monitors power supply status and initiates data backup procedures in advance, ensuring that critical laser device parameters are preserved in non-volatile memory before voltage drops occur, thus preventing data loss while maintaining fast access during operation.
Solution Approach 2:
The patent employs feedback mechanisms where the controller continuously monitors power supply voltage levels and data storage status. When voltage drops below a threshold or data modification is detected, the system automatically triggers data transfer from volatile to non-volatile memory. This feedback-controlled data protection ensures reliability during power transitions while maintaining the speed benefits of volatile memory during normal operation.
Data Source
AI summary
A controller includes a processor, a volatile memory, a nonvolatile memory, and a capacitor, and is configured to control a laser device. Here, the processor is configured to store a parameter of the laser device in the volatile memory when receiving power supply from outside the controller, and when the power supply from outside is stopped, store, in the nonvolatile memory, the parameter stored in the volatile memory and information indicating a duration time of power supply from the capacitor while receiving the power supply from the capacitor.