Laser Crystallization Apparatus Beam Profile Error Correction
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Laser crystallization methods for forming polycrystalline silicon in display devices often result in non-uniformity due to profile errors in combined laser beams, leading to display errors, as the energy distribution of the output laser beam is not uniformly distributed, causing interference and speckle formation.
Innovation Solution
A laser crystallization device and method that combines two laser beams with distinct profile error and non-error portions, using optical systems with different lens sets to align and offset these portions, minimizing energy differences and ensuring high uniformity in the combined beam for crystallization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple laser beams are combined to increase output energy for large glass substrates, then productivity and crystallization uniformity are improved, but profile error portions are generated due to interference and speckle formation
Solution Approach 1:
The invention divides the combined laser beam into multiple separate laser beams that are independently controlled. Each laser beam is processed through its own optical system with dedicated lens sets, allowing individual profile error correction before combination. This segmentation prevents interference and speckle formation that would occur with direct beam combination.
Solution Approach 2:
The invention introduces an optical system as an intermediary between the light sources and the combined beam output. This optical system includes lens sets that act as mediators to correct profile errors in each individual beam before they are combined, eliminating the profile error portions that would otherwise be generated by direct beam combination.
2Area of stationary object
If high laser output energy is used for large glass substrates, then crystallization coverage is improved, but profile error portions cause non-uniformity and display errors
Solution Approach 1:
The invention applies different optical corrections to different regions of the laser beam profile. The optical system is configured to specifically address profile error portions in different areas of the beam, ensuring that each region of the large glass substrate receives uniformly corrected laser energy for high-quality crystallization across the entire area.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The approach minimizes profile error portions in the combined laser beam, resulting in high uniformity of polycrystalline silicon formation, reducing display errors and enhancing the operational speed of display devices.
Implementation Method 1
a speckle due to interference is generated such that a profile error portion is generated
Implementation Method 2
a first lens set configured to receive the first light to generate a first transmitted light, the first transmitted light having a first profile
Implementation Method 3
the amorphous silicon thin film is melted by the heat and then solidifies to be crystallized
Implementation Method 4
the amorphous silicon thin film is melted by the heat and then solidifies to be crystallized
Data Source
AI summary
A laser crystallization device includes a first light source providing a first light and a second light source providing a second light. The device further includes a first lens set receiving the first light to generate a first transmitted light, the first transmitted light having a first profile, the first profile having a first profile error portion and a first non-error portion. The device further includes a second lens set receiving the second light to generate a second transmitted light, the second transmitted light having a second profile, the second profile having a second profile error portion and a second non-error portion, the second profile error portion corresponding to the first non-error portion, the second non-error portion corresponding to the first profile error portion. The device further includes an optical system combining the first transmitted light with the second transmitted light.