Laser Crystallization Apparatus with Automatic Line Focus Adjustment
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Solution Overview
Problem
The existing laser crystallization apparatuses face productivity issues due to manual adjustment of the P-lens module, leading to decreased efficiency and increased risk of product defects from non-uniform laser beam focus.
Innovation Solution
A laser crystallization apparatus with a line focus adjuster that includes a P-lens, P-lens drivers, and monitoring members to automatically adjust and maintain optimal line focus of parallel line beams, ensuring consistent energy distribution on the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If manual adjustment of P-lens module is performed to find optimal line focus, then manufacturing precision is improved, but productivity deteriorates due to long stop time
Solution Approach 1:
The system uses a monitoring chamber to automatically detect line focus position and a controller to automatically adjust the P-lens module position, eliminating the need for manual intervention and continuous stopping, thereby maintaining precision while improving productivity
Solution Approach 2:
The monitoring chamber provides real-time feedback on line focus position to the controller, which automatically adjusts the P-lens module to maintain optimal focus, enabling continuous operation without manual intervention
2Manufacturing precision
If manual adjustment of P-lens module is performed, then manufacturing precision is improved, but device complexity increases due to manual operation requirements
Solution Approach 1:
The system performs self-adjustment through automatic detection by the monitoring chamber and automatic control by the controller, eliminating complex manual operations while maintaining precision
Solution Approach 2:
The manual mechanical adjustment system is replaced with an automated control system that uses optical detection (monitoring chamber) and electronic control (controller) to adjust the P-lens module, reducing operational complexity
3Productivity
If optimal line focus is deviated, then productivity is maintained, but manufacturing precision deteriorates due to decreased laser beam energy
Solution Approach 1:
The monitoring chamber continuously monitors line focus position and provides feedback to the controller, which automatically adjusts the P-lens module to maintain optimal focus, ensuring both productivity and crystallization quality
Solution Approach 2:
The automatic monitoring and adjustment system enables continuous laser crystallization operation without stopping to readjust focus, maintaining both productivity and manufacturing precision throughout the process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances productivity by allowing continuous operation without stopping for focus adjustments and reduces defects by maintaining uniform laser beam focus, thereby improving the crystallization process efficiency.
Implementation Method 1
a P-lens that is a last lens from among the plurality of lenses and mirrors of the optical system which the plurality of line beams pass through
Implementation Method 2
a laser generator that generates a laser beam including a plurality of line beams that are parallel to each other... where a laser-crystallized thin film is formed on the substrate when the substrate is irradiated by the converted laser beam
Data Source
AI summary
A laser crystallization apparatus includes a laser generator that generates a laser beam including a plurality of line beams that are parallel to each other. An optical system includes a plurality of lenses and mirrors, wherein the optical system optically converts the generated laser beam to a converted laser beam. A chamber includes a stage and a substrate disposed on the stage, wherein a laser-crystallized thin film is formed on the substrate when the substrate is irradiated by the converted laser beam. A line focus adjuster that adjusts a line focus and a final focus of the plurality of line beams passing through the optical system, wherein the substrate is irradiated by the plurality of line beams at the final focus of the plurality of line beams.