Laser Crystallization Apparatus Beam Homogenizer Uniformity
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Solution Overview
Problem
Existing laser crystallization methods face challenges in achieving uniform laser beam profiles, particularly as glass substrate sizes increase, leading to non-uniform crystallization and potential defects in display devices like LCDs and OLEDs, especially when high-speed operation characteristics are required.
Innovation Solution
A laser crystallization apparatus and method that utilize multiple light sources and beam homogenizers with distinct lens arrays and path converters to ensure different laser beam paths, with lenses arranged at specific pitches and central axis alignments, to maintain uniform intensity and reduce intensity differences across the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the glass substrate size is increased to improve display area, then the laser output energy needs to be increased, but the laser beam profile uniformity deteriorates leading to non-uniform crystallization
Solution Approach 1:
The patent divides the single laser beam into multiple beams using beam homogenizers with lens arrays. The first beam homogenizer divides the laser beam into multiple sub-beams that are then recombined to form a uniform expanded beam profile, enabling uniform crystallization across large glass substrates while maintaining manageable laser energy levels
Solution Approach 2:
The patent transforms the laser beam from a single concentrated path to a two-dimensional array of multiple beams through the lens arrays in the beam homogenizers. This dimensional transformation allows the laser energy to be distributed uniformly across the entire large substrate area, solving the uniformity problem that arises when simply increasing laser power
2Manufacturing precision
If multiple light sources are used to improve beam uniformity, then the device complexity increases with multiple beam paths
Solution Approach 1:
The beam homogenizer assembly serves multiple functions simultaneously: it divides the laser beam into multiple sub-beams, recombines them into a uniform profile, and expands the beam width. This multi-functionality reduces the need for separate components and simplifies the overall optical system despite using multiple light sources
Solution Approach 2:
The patent merges the functions of beam division and beam recombination into a single integrated beam homogenizer structure. The lens arrays are arranged such that the same optical component performs both splitting and merging operations, reducing the number of separate elements needed and simplifying alignment requirements
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the uniformity of the laser beam profile, reduces errors due to external vibrations, and prevents streaks or stains in the final display device, improving the quality of crystallization and reducing dispersion by over 30% compared to traditional methods.
Implementation Method 1
the first beam homogenizer may include first lenses disposed to have a first pitch along a first direction, the second beam homogenizer may include second lenses disposed to have a second pitch along the first direction
Data Source
AI summary
A laser crystallization apparatus includes light sources that emit a first laser beam and a second laser beam; a first beam homogenizer through which the first laser beam passes; a second beam homogenizer through which the second laser beam passes; and an optical array on which the first laser beam passed through the first beam homogenizer and the second laser beam passed through the second beam homogenizer are incident. A first path of the first laser beam passed through the first beam homogenizer and a second path of the second laser beam passed through the second beam homogenizer are different from each other. The first beam homogenizer includes first lenses having a first pitch. The second beam homogenizer includes second lenses having a second pitch. The first pitch of the first lenses and the second pitch of the second lenses are same each other.