Laser Debris Remover with Vortex Suction for Wafer Processing
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Solution Overview
Problem
Existing laser processing apparatuses struggle to effectively suck and remove debris generated during the laser processing of wafers, particularly at the boundary between device and peripheral regions, leading to debris scattering.
Innovation Solution
A debris remover system comprising an air nozzle, suction duct with vortex generators, and a C-shaped sealing plate is integrated with the laser processing apparatus to guide and suck debris efficiently. The system includes an air nozzle to blow air towards the processing point, a suction duct with vortex generators to guide debris, and a C-shaped sealing plate to minimize the space between the suction opening and the workpiece.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-generated harmful factors
If a debris suction means is disposed adjacent to the condenser to suck debris, then debris removal function is provided, but the debris suction means is not able to sufficiently suck the debris
Solution Approach 1:
The suction opening is divided into multiple regions (first suction opening and second suction opening) positioned at different locations relative to the processing point. This segmentation allows debris to be suctioned from multiple directions and locations, improving overall suction effectiveness compared to a single suction opening
Solution Approach 2:
The suction openings are arranged in both lateral directions relative to the processing point, creating a two-dimensional suction coverage area. This dimensional arrangement ensures that debris scattered in different directions can be captured effectively, rather than relying on a single-point suction approach
2Reliability
If the space between the suction opening and the workpiece is reduced to improve suction efficiency, then debris suction is enhanced, but the structure becomes more complex
Solution Approach 1:
The first and second suction openings are merged into a single suction duct structure, allowing both openings to function together through a unified collection system. This merging approach improves suction efficiency while avoiding the need for separate complex systems for each opening
Solution Approach 2:
The suction duct serves multiple functions: it collects debris from both the first and second suction openings, and channels all debris to a single exhaust path. This multi-functionality reduces overall structural complexity compared to having separate systems for each suction opening
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively guides debris into the suction duct, ensuring it is sufficiently sucked and prevented from scattering, enhancing the cleanliness and precision of the laser processing.
Implementation Method 1
an air nozzle that blows air from one side toward a processing point at which the workpiece is irradiated with the laser beam
Implementation Method 2
vortex generators formed on a processing point side of the suction opening for guiding the scattering debris into the suction duct
Implementation Method 3
a suction duct having a suction opening for sucking debris that has scattered to another side
Data Source
AI summary
A debris remover includes an air nozzle that blows air from one side toward a processing point at which a workpiece is irradiated with a laser beam, a suction duct having a suction opening for sucking debris that has scattered to another side due to the air blown from the air nozzle, vortex generators formed on the processing point side of the suction opening for guiding the scattering debris into the suction duct, and a C-shaped sealing plate that is formed in such a manner as to surround the vortex generators from a rear side and reduces a space defined between the suction opening and the workpiece.