Laser-Modified Deposition Mask Frame for High-Resolution Adhesion

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Solution Overview

Problem

Existing wearable devices such as HMDs and AR glasses require high-resolution displays to prevent user dizziness, but current deposition masks do not ensure tight adhesion to the display panels, affecting manufacturing precision and resolution.

Innovation Solution

A silicon deposition mask with a mask metal layer that includes a heat-affected portion, formed by laser irradiation, providing improved adhesion and ensuring high-resolution display panel manufacturing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional deposition mask is used, then the mask structure is simple, but the adhesion to the display panel is insufficient

Engineering Contradiction:
ImproveadhesionVSAvoidmask structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The mask frame is constructed as a composite structure comprising a mask substrate, mask inorganic layer, and mask metal layer. The mask metal layer contains a heat-affected portion formed by laser irradiation that merges with the display panel, creating strong adhesion. This composite structure resolves the contradiction by providing both reliable adhesion through the heat-affected portion and a manageable structure through the layered composite design.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The mask metal layer undergoes parameter change through laser irradiation, transforming from a separate layer into a heat-affected portion that merges with the display panel. This parameter change (thermal processing) enables the mask metal layer to achieve strong adhesion without significantly complicating the overall mask structure, as the process is integrated into the existing manufacturing flow.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If the mask metal layer is added to improve adhesion, then adhesion is improved, but the manufacturing process becomes more complex

Engineering Contradiction:
ImproveadhesionVSAvoidmanufacturing process
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The mask metal layer is formed in advance as part of the mask frame structure before the deposition process. The heat-affected portion is pre-formed through laser irradiation during mask fabrication, so that when the mask is assembled with the display panel, the adhesion is already optimized. This preliminary action avoids adding complex steps during the final assembly or deposition process.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The mask metal layer is merged with the display panel through the heat-affected portion formed by laser irradiation. This merging integrates the adhesion function into the existing mask-frame-display panel assembly process, rather than requiring separate adhesion promotion steps. The mask metal layer serves dual purposes: structural support and adhesion enhancement through the heat-affected portion.

Inventive Principle:
Principle #5Merging (Combining)

3Manufacturing precision

If high-resolution display is manufactured, then display quality is improved, but adhesion requirements become more stringent

Engineering Contradiction:
Improvedisplay resolutionVSAvoidadhesion
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The heat-affected portion is formed locally in the mask metal layer where it contacts the display panel, providing enhanced adhesion precisely where needed for high-resolution manufacturing. This localized treatment allows the rest of the mask structure to maintain its optimized design for high-resolution display while ensuring strong adhesion at the critical interface.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The deposition mask enhances adhesion to display panels, enabling the production of high-resolution displays suitable for wearable devices without dizziness issues.

Implementation Method 1

the mask metal layer includes a portion condensed or melted by laser irradiation

Methodology Applied
Scientific EffectLaser irradiation: Laser

Implementation Method 2

a portion condensed or melted by laser irradiation

Methodology Applied
Scientific EffectLaser heating: Heating

Implementation Method 3

a portion condensed or melted by laser irradiation

Methodology Applied
Scientific EffectCondensation: Condensation

Implementation Method 4

a portion condensed or melted by laser irradiation

Methodology Applied
Scientific EffectMelting: Melting

Data Source

PatentUS20250345821A1Deposition mask
Publication Date: 2025.11.13 SAMSUNG DISPLAY CO LTD
  • US20250345821A1 patent drawing
  • US20250345821A1 patent drawing
  • US20250345821A1 patent drawing

AI summary

A deposition mask includes a mask substrate including a cell area and a cell peripheral area; a mask membrane positioned in the cell area of the mask substrate, where a pixel opening is defined through the mask membrane, and the mask membrane includes a mask shadow surrounding the pixel opening; and a mask frame positioned on the cell peripheral area of the mask substrate, where the mask frame includes the mask substrate, a mask inorganic layer and a mask metal layer. The mask metal layer does not overlap the cell area in a direction perpendicular to the mask substrate and is in contact with the mask substrate, and the mask metal layer includes a portion condensed or melted by laser irradiation.