Surface-Emitting Laser Dielectric Mode Filter

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing surface-emitting semiconductor laser elements face challenges in maintaining high output in single transverse mode due to increased electric resistance and shortened service life from narrow groove intervals, and manufacturing methods like crystal growth interruptions lead to property variations and low production yield.

Innovation Solution

A surface-emitting laser element structure with a dielectric mode filter having a lower reflection ratio in the peripheral area compared to the center, formed using a tilted substrate and selective oxidation, which reduces electric resistance and stabilizes transverse mode control.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If narrow groove intervals are used to prevent higher-order transverse mode oscillation, then transverse mode control is improved, but electric resistance increases and service life shortens

Engineering Contradiction:
Improvetransverse mode controlVSAvoidservice life
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent applies local quality by creating a mode filter with spatially varying reflection ratios - the peripheral area has lower reflection ratio than the center area. This localized differentiation allows the peripheral region to suppress higher-order modes while the center region maintains optimal optical feedback, preventing the need for uniformly narrow grooves that would increase resistance and reduce service life.

Inventive Principle:
Principle #3Local quality

2Manufacturing precision

If crystal growth is interrupted for manufacturing the mode filter, then transverse mode control is improved, but property variations increase and production yield decreases

Engineering Contradiction:
Improvetransverse mode controlVSAvoidproduction yield
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The mode filter structure is designed and prepared in advance during the crystal growth process, with the peripheral area and center area having predetermined different reflection ratios. This preliminary configuration eliminates the need for interrupting crystal growth during manufacturing, allowing continuous production while maintaining precise transverse mode control and consistent device properties.

Inventive Principle:
Principle #10Preliminary action

3Manufacturing precision

If the peripheral area has lower reflection ratio than the center area, then higher-order transverse mode oscillation is prevented, but device complexity increases

Engineering Contradiction:
Improvetransverse mode controlVSAvoidstructure complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent implements parameter changes by varying the reflection ratio parameter across different spatial regions of the mode filter. The peripheral area is designed with a lower reflection ratio parameter compared to the center area, enabling effective suppression of higher-order modes. This parameter differentiation is achieved through straightforward structural design rather than complex mechanisms, maintaining manufacturing simplicity while achieving superior mode control.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution achieves stable single-mode output with increased production yield and extended service life, allowing for high-volume production and cost-effective manufacturing while preventing higher-order transverse mode oscillation.

Implementation Method 1

A surface-emitting laser element structure with a dielectric mode filter having a lower reflection ratio in the peripheral area compared to the center, formed using a tilted substrate and selective oxidation

Methodology Applied
Scientific EffectSelective oxidation: Oxidation

Data Source

PatentEP2330698B1Surface-emitting laser element, surface-emitting laser array, optical scanning device, and image forming apparatus
Publication Date: 2020.08.19 RICOH CO LTD
  • EP2330698B1 patent drawingFigure 1
  • EP2330698B1 patent drawingFigure 2
  • EP2330698B1 patent drawingFigure 3

AI summary

A surface-emitting laser element (100A) includes a substrate (101); a plurality of semiconductor layers laminated on the substrate (101), the plural semiconductor layers including a resonator structural body including an active layer (105) and semiconductor multilayer film reflection mirrors (103,107) having the resonator structural body sandwiched therebetween; an electrode (113) provided in such a manner as to surround an emitting region on a surface of the surface-emitting laser element (100A) from which light is emitted; and a dielectric film (115) provided in the emitting region such that a reflection ratio of a peripheral part of the emitting region is different from a reflection ratio of a center part of the emitting region. Edge portions that are near edges of the dielectric film (115) are tilted with respect to the surface.