U-Shaped Dust Collector for Laser Processing Optical Path Protection
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Laser processing of semiconductor and optical device wafers results in dust debris that can stick to devices and interfere with the laser beam's optical path, causing defective processing.
Innovation Solution
A laser processing apparatus with a U-shaped dust collector and suction means connected to a vacuum source, which directs air flow to discharge dust generated by the laser beam application without hindering the optical path.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If dust discharging means is used to collect and discharge dust generated by laser beam application, then dust accumulation on devices and focusing lens is reduced, but dust may rise spirally along the optical path and hinder the laser beam
Solution Approach 1:
The dust collector extracts dust particles from the processing area using suction force, separating them from the optical path before they can cause contamination or interference. The extraction mechanism removes harmful dust without affecting the laser beam transmission.
Solution Approach 2:
A non-particulate matter (air flow) is introduced as an intermediary to carry dust particles away from the optical path. The air flow acts as a mediator that transports dust from the generation point to the collector without the dust directly interfering with the laser beam.
2Productivity
If a pulsed laser beam is applied along the streets to form laser processed grooves, then the wafer can be divided along the streets, but the wafer is melted to cause scattering of melt dust and debris
Solution Approach 1:
The suction force, which creates a negative pressure region, is used to convert the harmful melt dust and debris into beneficial controlled removal. The same energy that causes melting also generates vapor and debris that can be efficiently captured by the suction system, turning a harmful byproduct into a manageable flow.
Solution Approach 2:
A pneumatic system using air flow and pressure differential is employed to remove melt dust and debris. The suction force creates a controlled air current that carries away the harmful particles generated during laser processing, using gas dynamics to solve a solid particle contamination problem.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively prevents dust from rising and interfering with the laser beam, ensuring accurate and high-quality processing by directing debris away from the optical path.
Implementation Method 1
suction means including a suction duct having one end connected to the first rectangular opening of the dust collector and the other end connected to a vacuum source
Data Source
AI summary
A laser processing apparatus including a dust discharging unit for discharging dust generated by the application of a laser beam from a focusing unit to a workpiece. The dust discharging unit includes a dust collector provided below the focusing unit and a suction unit connected to the dust collector. The dust collector has a U-shaped configuration composed of a rectangular top wall having an opening for allowing the pass of the laser beam applied from the focusing unit, a first side wall projecting downward from one side edge of the top wall, and a second side wall projecting downward from the other side edge of the top wall so as to be opposed to the first side wall. The suction unit includes a suction duct having one end connected to the dust collector and the other end connected to a vacuum source.