Laser Processing Apparatus Dust-Suction Duct Plasma Control
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Solution Overview
Problem
Laser processing apparatuses face issues with laser-excited plasma clouds interfering with the optical path during substrate translation, causing meandering of processed lines due to the unique refractive index of the plasma cloud, which is not effectively addressed by existing dust removal methods.
Innovation Solution
A laser processing apparatus with a dust-suction duct and air aspirator configuration that includes air-guiding plates to create a laminar flow, aspirating the plasma cloud away from the optical path, ensuring precise laser beam focusing by maintaining the plasma cloud's inclination and preventing meandering.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-generated harmful factors
If an air blower blows air in the same direction as substrate translation to remove debris, then debris is shifted away from the optical path, but the laser-excited plasma cloud remains on the optical path causing meandering
Solution Approach 1:
The patent inverts the conventional air blowing approach by using suction instead of blowing. The air suction unit creates a suction force that draws the plasma cloud away from the optical path in the direction opposite to substrate translation, effectively removing the harmful refractive effect without compromising processing precision
Solution Approach 2:
The patent extracts the plasma cloud from the optical path using a dedicated suction system. By positioning the suction unit to specifically target and remove the plasma cloud generated during laser processing, the system separates the harmful plasma effect from the processing zone, preventing meandering while maintaining debris removal capability
2Object-generated harmful factors
If the laser beam passes through the laser-excited plasma cloud, then the plasma cloud is removed from the processing area, but the unique refractive index of the plasma cloud causes the laser beam to not focus on targeted points
Solution Approach 1:
The patent applies preliminary action by creating a suction flow field before the laser beam encounters the plasma cloud. The air suction unit establishes a controlled airflow that preemptively directs the plasma cloud away from the optical path, ensuring that when the laser beam passes through, the plasma cloud is already positioned to minimize refractive interference
Solution Approach 2:
The patent introduces air flow as an intermediary medium between the laser beam and the plasma cloud. This air flow acts as a mediator that transports the plasma cloud away from the optical path without directly interfering with the laser beam propagation, allowing the laser to maintain its focusing accuracy while the plasma cloud is removed
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents meandering of processed lines by aspirating the laser-excited plasma cloud, ensuring precise laser beam focusing and improving the cleanliness of the processing area, thereby enhancing the production yield and reliability of the laser processing.
Implementation Method 1
an air aspirator provided downstream the dust-suction duct, the air aspirator aspirating an air within the dust-suction duct toward a direction opposite to the first direction
Implementation Method 2
a laser beam source radiating a laser beam onto the substrate held on the stage to process the substrate
Implementation Method 3
a portion of a constituent of the processed substrate such as silicon and sapphire is fused
Implementation Method 4
the laser-excited plasma cloud has a unique refractive index so that the laser beam passing through the laser-excited plasma cloud may not focus on the targeted points or streets
Data Source
AI summary
Provided is a laser processing apparatus comprises a stage holding a substrate, the stage being movable in a first direction, a laser beam source radiating a laser beam onto the substrate, a dust-suction duct having a first optical path extending in a second direction perpendicular to the first direction, the laser beam travelling along the first optical path thereof, and an air aspirator aspirating an air toward a direction opposite to the first direction, wherein the dust-suction duct includes a pair of air-guiding plates opposed to each other along a third direction perpendicular to the first and second directions, and wherein the pair of the air-guiding plates are configured to have a gap therebetween such that it is narrowest in an optical path region and gets wider as it is far away from the optical path region in upstream and downstream regions thereof.