Erosion Resistant Laser Electrodes With Curved Transition Profiles
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Solution Overview
Problem
The existing designs of excimer laser electrodes in chambers suffer from non-uniform erosion due to electrical discharges, leading to inconsistent output laser light quality and reduced longevity, as the conventional sloped transitions between active and end portions result in sharper shapes that enhance electrode erosion.
Innovation Solution
The improved electrode design features a transition structure with substantially vertical sidewalls and a curve that connects the active and end portions, eliminating the sloped surface and pre-shaping the anode's surface to mimic the naturally occurring erosion profile, ensuring consistent electrical discharge and extended electrode life.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If conventional sloped transitions are used between active and end portions of electrodes, then manufacturing is easier, but electrode erosion becomes non-uniform and longevity decreases
Solution Approach 1:
The electrode is pre-shaped during manufacturing to have a curved surface profile that anticipates and compensates for future erosion. The surface is prepared in advance with a specific curvature that will maintain uniform discharge characteristics even after material is removed during operation, thereby extending electrode life while maintaining consistent performance
Solution Approach 2:
The invention changes the surface geometry parameter from a conventional sloped transition to a specifically designed curved profile. This parameter change in the surface shape creates a distribution of electric field strength that compensates for erosion, maintaining uniform discharge characteristics over time and extending electrode longevity
2Device complexity
If conventional sloped transitions are used between active and end portions, then device complexity is reduced, but output laser light quality becomes inconsistent
Solution Approach 1:
The electrode surface is pre-shaped with a specific curved profile that anticipates erosion patterns. This preliminary shaping ensures that as the electrode erodes during operation, the curved geometry maintains a consistent electric field distribution, thereby maintaining uniform laser light output quality throughout the electrode's operational life
Solution Approach 2:
The surface geometry parameter is changed from a simple sloped transition to a carefully designed curved profile. This parameter change creates a controlled distribution of electric field strength that compensates for material removal during operation, ensuring consistent discharge characteristics and uniform laser light quality without significantly increasing device complexity
3Ease of manufacture
If sloped surfaces are used for transition between portions, then manufacturing is simpler, but electrical discharge becomes non-uniform causing increased erosion
Solution Approach 1:
The electrode surface is pre-shaped with a curved profile that anticipates erosion. By preparing the surface in advance with this specific curvature, the design ensures that electrical discharge remains uniform even as material is removed during operation, thereby reducing the harmful erosion effect and extending electrode life
Solution Approach 2:
The surface geometry parameter is changed from a sloped transition to a curved profile. This parameter change creates a controlled electric field distribution that prevents discharge concentration at transition regions, thereby reducing localized erosion and maintaining uniform electrode wear that extends overall electrode longevity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design reduces non-uniform erosion and maintains consistent output laser light quality over time, extending the mean time between service and improving the longevity of the electrodes by evenly distributing electrical discharge.
Implementation Method 1
The pulses across the electrodes cause electrical discharge in the spatial region between the electrodes. This electrical discharge excites the laser gas to produce pulses of laser light
Data Source
AI summary
Anodes and cathodes for use in generating gas discharge laser light are disclosed. The improved anode has a transition portion that includes a substantially vertical sidewall to transition between the active portion and the end portion to reduce erosion-related issues. The improved cathode has thickened spine portions in enhanced erosion locations. The spine portions are thickened by removing material from the shoulder of the cathode stepped cross-section profile in those locations in order to improve the longevity of the cathode.