Laser Exposure Optics With Switchable Spot Sizes for Mixed Line Widths
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current laser processing systems lack adaptability to handle workpieces with varying line widths, requiring different processing devices and resulting in high costs due to limited adjustability of light spot sizes.
Innovation Solution
An exposure system with a light spot switching unit that directs a laser beam along different optical paths to produce light spots ranging from tens of microns to hundreds of microns, allowing for adjustable sizes based on desired power density and workpiece requirements, incorporating a laser unit, light spot switching unit, and lens unit for precise control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If different processing devices are used for workpieces with different line widths, then processing precision is maintained, but device complexity and cost increase
Solution Approach 1:
The patent implements a single exposure device with variable light spot size capability that can process workpieces with different line widths. The light spot switching unit enables the system to adapt to different processing requirements (glass frit sealing, laser micromachining, marking, drilling) by dynamically changing light spot diameter from tens of microns to tens of millimeters, replacing the need for multiple dedicated processing devices.
Solution Approach 2:
The patent employs dynamic adjustment of light spot size through the light spot switching unit, which can switch between different optical paths (first optical path for small spots, second optical path for large spots) based on real-time processing requirements. This dynamic adaptability allows one device to handle varying workpiece conditions that previously required multiple fixed-configuration devices.
2Adaptability or versatility
If a single exposure device handles all workpiece types, then adaptability improves, but manufacturing precision may deteriorate
Solution Approach 1:
The patent divides the optical system into distinct segments: a first optical path optimized for small light spots (diffraction-limit principle) and a second optical path optimized for large light spots (geometrical imaging). The light spot switching unit selectively activates the appropriate segment based on workpiece requirements, ensuring that each segment maintains its specialized optimization for specific processing tasks while providing overall system versatility.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances processing adaptability and reduces costs by enabling the formation of light spots of various sizes to suit different workpiece dimensions, improving throughput and exposure uniformity.
Implementation Method 1
a laser unit, configured to produce a laser beam
Implementation Method 2
the light spot switching unit may include a first optical path and a second optical path, the first optical path configured to follow the diffraction-limit principle to generate a first light spot
Implementation Method 3
the first optical path configured to follow the diffraction-limit principle to generate a first light spot
Implementation Method 4
the lens unit is configured to alter a direction in which the laser beam is incident on the workpiece
Data Source
AI summary
An exposure system (10), an exposure apparatus and an exposure method are disclosed. The exposure system (10) includes: a laser unit (11), a light spot switching unit (12) and a lens unit (13); the laser unit (11) is configured for producing a laser beam; the light spot switching unit (12) is configured to direct the laser beam to travel along one of different optical paths based on a desired size of a light spot for a workpiece to be exposed so that a laser beam in correspondence with the desired size of the light spot is obtained; and the lens unit (13) is configured for altering a direction in which the laser beam is incident on the workpiece. The light spot switching unit (12) enables the laser beam to be switched between the different optical paths so as to form light spots sized in different ranges, which can satisfy different needs of workpieces with various critical dimensions. As a result, an improvement in processing adaptability to different workpieces and a significant reduction in cost can be achieved.