Laser Focus Control for Stacked Structure Analysis
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Solution Overview
Problem
The LA-ICP-MS apparatus faces challenges in accurately controlling the focus of the laser beam during ablation of stacked structures, leading to variations in metal element concentration analysis due to manual focus adjustment and difficulty in recognizing the shape of the stacked structure in the depth direction.
Innovation Solution
An analysis apparatus and method that includes a stage with both an analysis sample and adjustment samples, where the laser focus is automatically adjusted based on signal intensity detected by a detection unit, ensuring the focus position corresponds with the front surface of the adjustment samples, thereby stabilizing the ablation rate and improving analysis precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manual focus adjustment is performed by an operator, then the laser focus can be adjusted before or during ablation, but there is a variation in the focus adjustment for each measurement
Solution Approach 1:
The system performs automatic focus adjustment using a sensor to detect the front surface position of the adjustment sample, eliminating the need for manual operator intervention. The focus position is automatically determined and adjusted based on detected signals, making the system self-regulating and consistent across measurements.
Solution Approach 2:
The system uses a sensor to detect the front surface position of the adjustment sample and provides feedback to the control unit. The control unit then adjusts the focus position of the laser beam based on this feedback signal, creating a closed-loop control system that ensures accurate and consistent focus positioning.
2Measurement precision
If automatic focus adjustment is implemented using detection units, then focus position consistency is improved, but device complexity increases
Solution Approach 1:
The adjustment sample serves multiple functions: it is used for focus adjustment, provides a reference front surface for positioning, and enables automatic detection. This multi-functional design reduces the need for separate components and simplifies the overall system configuration.
Solution Approach 2:
An adjustment sample with a known front surface is introduced as an intermediary element between the laser system and the actual analysis sample. This intermediary provides a stable reference for focus adjustment and positioning, simplifying the control mechanism while improving precision.
3Manufacturing precision
If the focus position is not accurately controlled, then the ablation rate varies, but maintaining accurate focus requires complex manual adjustment procedures
Solution Approach 1:
The manual mechanical focus adjustment procedure is replaced with an automatic optical-detection-based system. The sensor detects the front surface position and the control unit automatically adjusts the focus, replacing manual mechanical operations with an automated detection-and-control system.
Solution Approach 2:
The system performs preliminary focus adjustment using the adjustment sample before analyzing the actual sample. The front surface of the adjustment sample is detected first, and the focus is pre-adjusted to the correct position, ensuring accurate ablation depth control from the start of the analysis.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for precise control of the laser focus, reducing variations and enabling accurate profiling of metal elements within stacked structures, thereby enhancing the precision and reliability of metal element analysis in LA-ICP-MS systems.
Implementation Method 1
A laser ablation-inductively coupled plasma-mass spectrometer (LA-ICP-MS) apparatus vaporizes a sample by irradiating the sample with a laser beam using a laser ablation device
Implementation Method 2
introduces the vaporized sample into an ICP-MS device
Implementation Method 3
performs quantitative analysis of a metal element contained in the sample
Data Source
AI summary
An analysis apparatus includes a stage on which an analysis sample as an analysis target and a first adjustment sample used for adjusting a focus are provided. A laser generation unit generates a laser beam for vaporizing the analysis sample or the first adjustment sample by irradiating the sample with the laser beam. A detection unit detects a signal intensity of an element of the analysis sample or the first adjustment sample vaporized by irradiation with the laser beam. A controller determines a focus position of the laser beam with respect to a front surface position of the first adjustment sample based on the signal intensity of the first adjustment sample, and performs a control such that the focus position of the laser beam corresponds with a front surface of the analysis sample.