Laser Focus Landing Using Reflected Light and Fluorescence
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Solution Overview
Problem
Existing laser nanofabrication technologies lack an automated method to accurately land the laser focus on the workpiece surface, leading to potential damage from manual operation and processing failures.
Innovation Solution
An automatic landing method and system that adjusts the microscope objective's position based on real-time detection of reflected light intensity or fluorescence, using an image sensor, detector, and controller to determine the optimal focus position, allowing for precise alignment without manual intervention.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual landing of laser focus on workpiece surface is used, then user experience and judgment are required for operation, but the risk of microscope objective hitting the workpiece increases, causing damage and processing failure
Solution Approach 1:
The system performs self-positioning by automatically detecting the workpiece surface and locating the laser focus point without requiring manual intervention. The controller autonomously adjusts the microscope objective position based on reflected light intensity or fluorescence signals, enabling the system to serve itself in the landing process.
Solution Approach 2:
The patent replaces manual mechanical operation with an automated detection and control system. Instead of relying on user experience to manually position the microscope objective, the system uses optical detection (reflected light intensity or fluorescence) combined with controller logic to automatically determine and adjust the focus position, substituting human judgment with instrumental measurement.
2Productivity
If automated landing method is implemented, then the risk of damage is reduced and processing yield is improved, but the device complexity increases due to additional detection components
Solution Approach 1:
The system achieves multi-functionality by using a single detection framework that can operate with different detection modes (reflected light intensity or fluorescence) depending on the workpiece material and processing requirements. The same basic system architecture supports multiple landing strategies without requiring completely separate hardware configurations.
Solution Approach 2:
The patent introduces an intermediary detection mechanism (reflected light intensity or fluorescence signal) that mediates between the laser focus and the workpiece surface. This intermediary signal provides indirect information about focus position, allowing the system to determine landing accuracy without direct physical contact or complex positioning mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables quick and accurate landing of the laser focus, enhancing processing yield, quality, and accuracy while being cost-effective by requiring minimal hardware changes to existing systems.
Implementation Method 1
the intensity of the reflected light is detected in real-time according to the image
Implementation Method 2
detect whether there is fluorescence in real-time according to the image
Data Source
AI summary
An automatic landing method, system, and storage medium for laser processing. The method includes: adjusting the relative position of the microscope objective and the workpiece to be processed along the direction of the optical axis within a preset travel range; during the adjustment process, collecting images of the workpiece to be processed in real-time and detecting the intensity of reflected light or fluorescence in real-time according to the image; determine the position of the strongest reflected light or the fluorescence initiation position according to the intensity detection data of reflected light or fluorescence. By scanning the intensity of reflected light or fluorescence, the invention achieves the purpose of quickly and accurately adjusting the laser focus to land on the surface to be processed, effectively improving the processing success rate, processing quality, and processing accuracy, and the solution is economical and efficient.