Laser Focusing Shape for Faster Internal Crack Peeling
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Solution Overview
Problem
Laser processing apparatuses face challenges in reducing tact time when forming modified regions along virtual planes inside objects, as existing methods do not efficiently facilitate the spread of cracks along these planes, leading to increased operation times.
Innovation Solution
The apparatus includes a support portion, an emission portion, and a moving mechanism that shapes the laser light to have a longitudinal direction intersecting the direction of movement, allowing the crack to extend in this direction and spread effectively along the virtual plane, with options for the longitudinal direction being tilted at 45° or more, or perpendicular to the movement direction, and focusing region shapes with ellipticity between 0.88 to 0.95.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the laser light is emitted with a conventional focusing region shape (circular or isotropic), then the modified region is formed along the virtual plane, but the crack extension is insufficient and the tact time is increased
Solution Approach 1:
The patent applies asymmetry by shaping the focusing region of the laser light into an elliptical cross-section with a specific longitudinal direction. This asymmetric shape causes cracks to preferentially extend in the longitudinal direction of the ellipse, improving crack spread efficiency along the virtual plane and reducing tact time without compromising processing reliability
Solution Approach 2:
The patent changes the geometric parameters of the focusing region by controlling the aspect ratio (ellipticity) to be between 0.88 and 0.95, and by orienting the longitudinal direction at 45° or more relative to the movement direction. These parameter changes optimize crack extension behavior to achieve faster processing while maintaining reliable peeling
2Productivity
If the interval between reformation spots is increased to reduce processing time, then the productivity improves, but the crack may not spread sufficiently along the virtual plane
Solution Approach 1:
The asymmetric elliptical focusing region shape with a defined longitudinal direction creates a directional crack extension pattern. This allows cracks to reliably bridge larger intervals between reformation spots while still achieving complete peeling, thus enabling increased processing speed without sacrificing peeling precision
Solution Approach 2:
The patent introduces directional control in the longitudinal dimension of the elliptical focusing region. By orienting this dimension at 45° or more to the movement direction, crack propagation is guided along the virtual plane, ensuring sufficient spread even when intervals between reformation spots are increased for faster processing
3Ease of operation
If the longitudinal direction of the focusing region is parallel to the movement direction, then the processing is simple, but the crack extension along the virtual plane is insufficient
Solution Approach 1:
The patent deliberately orients the longitudinal direction of the elliptical focusing region at 45° or more relative to the movement direction, creating an asymmetric configuration that optimizes crack extension along the virtual plane. This maintains processing simplicity through controlled beam shaping while significantly improving crack spread reliability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces tact time by enabling efficient spread of cracks along the virtual plane, even with increased intervals between reformation spots, and allows precise peeling of object parts along the modified region and crack boundaries.
Implementation Method 1
a laser light with a part of a focusing region being on the object is emitted onto the object to form a modified region along a virtual plane inside the object
Implementation Method 2
The emission portion includes a shaping portion configured to shape the laser light such that a shape of the part of the focusing region in a plane along the virtual plane has a longitudinal direction
Data Source
AI summary
A laser processing apparatus emits a laser light with a part of a focusing region being on an object to form a modified region along a virtual plane inside the object. The laser processing apparatus includes a support portion, an emission portion that emits the laser light onto the object, a moving mechanism that moves at least one of the support portion and the emission portion so that the part of the focusing region moves along the virtual plane inside the object, and a controller. The emission portion includes a shaping portion that shapes the laser light such that the shape of the part of the focusing region in a plane perpendicular to an optical axis of the laser light has a longitudinal direction. The longitudinal direction is a direction intersecting the direction of movement of the part of the focusing region.


