Laser Apparatus Frame Positioning Sleeve and Fall Prevention
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Solution Overview
Problem
In the manufacturing of laser apparatuses for EUV light generation, particularly for microfabrication with feature sizes of 32 nm or less, existing systems face challenges in positioning and connecting large frames with complex configurations, leading to difficulties in transportation and installation due to the need for precise alignment and the risk of components falling or being misplaced during assembly and disassembly.
Innovation Solution
The proposed solution involves a laser apparatus configuration that includes a pair of frames with a sleeve through-hole and sleeve insertion portion, a bolt, a positioning sleeve, and a fall prevention unit, allowing for easier positioning and alignment of frames using a positioning sleeve and bolt, which can be transported and reconnected without the need for complex repositioning of individual modules at the installation site, thereby reducing operational complexity and time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If frames are connected with bolts and positioning sleeves during manufacturing, then positioning precision and connection reliability are improved, but the complexity of assembly and disassembly operations increases
Solution Approach 1:
The positioning sleeve is pre-installed on the bolt before the assembly operation begins. This preliminary action ensures that when the bolt is inserted through the alignment hole, the positioning sleeve is already in place to guide the frames into precise alignment, eliminating the need for complex positioning operations during assembly
Solution Approach 2:
The positioning sleeve acts as an intermediary component between the bolt and the frames. It mediates the connection process by providing a guiding surface that ensures precise alignment of the frames while the bolt provides the securing function, separating these two functions into distinct components
2Adaptability or versatility
If frames are disconnected for transportation, then transportability is improved, but the risk of components falling or being misplaced increases
Solution Approach 1:
The positioning sleeve is nested on the bolt, with the sleeve fitting over the bolt shaft. This nested configuration ensures that both components remain associated with each other during disassembly and transportation, preventing the positioning sleeve from being lost or misplaced while allowing the frames to be disconnected for transport
Solution Approach 2:
The fall prevention unit automatically prevents the positioning sleeve from falling off the bolt during disassembly and transport. The component structure itself provides the protection mechanism through the nested configuration and fall prevention features, eliminating the need for additional protective measures
3Ease of manufacture
If multiple laser system modules are mounted in separate frames, then modularity and ease of manufacturing are improved, but the time and operations required for reassembly at installation site increase
Solution Approach 1:
The frames are pre-assembled with their respective laser system modules and pre-positioned using the positioning sleeve and bolt mechanism at the manufacturing site. This preliminary assembly and positioning eliminates the need for complex repositioning operations at the installation site, reducing reassembly time while maintaining modularity
Solution Approach 2:
The complex mechanical positioning and alignment operations that would normally be required at the installation site are replaced by the pre-installed positioning sleeve and bolt system. The mechanical features are designed to automatically guide alignment during reconnection, substituting manual positioning operations with a self-guiding mechanical system
Data Source
AI summary
A laser apparatus may include, a first frame and a second frame, a sleeve through-hole provided in the second frame, a sleeve insertion hole provided in the first frame, a bolt, a positioning sleeve that is formed in an approximately cylindrical shape into which the bolt can be inserted and that positions the first frame and the second frame by passing through the sleeve through-hole and being inserted into the sleeve insertion hole, a nut that is provided in the first frame and into which the bolt is screwed, and a fall prevention unit that is provided in the second frame and that prevents the bolt and the positioning sleeve from falling.