Laser Apparatus Fiber Fusion Prevention via Power Monitoring

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Solution Overview

Problem

The existing laser apparatuses face issues with fiber fusion due to poor connection states between optical fibers, leading to overheating and damage during transport, installation, and operation, which can result in reduced transmittance and increased risk of fiber burnout.

Innovation Solution

A laser apparatus with a control unit and monitor unit that adjusts the excitation light source's power level based on monitored power levels, ensuring safe operation by stopping the light output if the connection state is poor or degrading, thereby reducing the likelihood of fiber fusion.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If the optical fiber connection is separated to facilitate transport and installation, then the ease of operation is improved, but the reliability deteriorates due to poor connection states causing fiber fusion

Engineering Contradiction:
Improveease of transport and installationVSAvoidconnection state reliability
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The system performs preliminary monitoring of the optical fiber connection state before high-power excitation light is applied. The monitor unit detects connection quality in advance, and the control unit prevents high-power operation until proper connection is confirmed, thereby avoiding fiber fusion while maintaining the benefits of separable fiber connections for transport and installation.

Inventive Principle:
Principle #10Preliminary action

2Productivity

If high power excitation light is output to improve productivity, then the productivity is improved, but the object-generated harmful factors worsen due to fiber overheating and burnout

Engineering Contradiction:
Improveoutput light generation efficiencyVSAvoidfiber overheating and burnout
Core Design Contradiction:
ProductivityVSObject-generated harmful factors

Solution Approach 1:

The monitor unit continuously monitors the connection state of the optical fiber and provides feedback to the control unit. Based on this feedback, the control unit dynamically adjusts the excitation light output power - maintaining high power when connection is good (ensuring productivity) and reducing or stopping power when connection deteriorates (preventing fiber overheating and burnout).

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system applies preliminary anti-action by detecting connection state abnormalities before they lead to fiber fusion. The monitor unit identifies poor connection states in advance, and the control unit preemptively reduces or stops excitation light output, preventing the harmful effect of fiber overheating and burnout before it occurs.

Inventive Principle:
Principle #9Preliminary anti-action

3Reliability

If the connection state monitoring is added to improve reliability, then the reliability is improved, but the device complexity increases

Engineering Contradiction:
Improvefiber connection reliabilityVSAvoidmonitoring system complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The monitor unit is integrated into the existing laser apparatus structure, utilizing components already present in the system. The monitoring function leverages existing optical paths and control infrastructure, allowing the system to self-monitor connection states without requiring extensive external equipment or complex additional systems, thus improving reliability while minimizing the increase in device complexity.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution significantly reduces the occurrence of fiber fusion by ensuring proper power management and connection validation, enhancing the reliability and safety of the laser apparatus during transport, installation, and operation.

Implementation Method 1

an optical amplifier unit, which optically amplifies by receiving excitation light that is output from the excitation light source and that transits an optical fiber

Methodology Applied
Scientific EffectOptical fiber transmission: Optical Fibre

Implementation Method 2

an optical amplifier unit, which optically amplifies by receiving excitation light that is output from the excitation light source

Methodology Applied
Scientific EffectOptical amplification:

Data Source

PatentUS9160132B2Laser apparatus, light therapy apparatus, exposure apparatus, device manufacturing method, and object inspection apparatus
Publication Date: 2015.10.13 NIKON CORP
  • US9160132B2 patent drawing
  • US9160132B2 patent drawing
  • US9160132B2 patent drawing

AI summary

The present invention greatly reduces the likelihood that fiber fusion will occur. A laser apparatus comprises an excitation light source and an optical amplifier unit, which optically amplifies by receiving excitation light that is output from the excitation light source and that transits an optical fiber. A monitor unit monitors the power level of the excitation light transmitted from the excitation light source to the optical amplifier unit side via the optical fiber. At the initial start of the output of the excitation light from the excitation light source, once the excitation light is being output at the prescribed power level by the excitation light source, the control unit performs control such that the excitation light at a power level higher than the prescribed power level is output if the power level monitored by the monitor unit is greater than or equal to a prescribed value when the excitation light at the prescribed power level is being output from the excitation light source and such that the output of the excitation light is stopped if the power level monitored by the monitor unit is less than the prescribed value when the excitation light at the prescribed power level is being output from the excitation light source.