Laser Gap Measurement for Electrostatic Chuck Edge Ring Alignment

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Solution Overview

Problem

Accurately measuring the gap between the support member and the edge ring in an electrostatic chuck is challenging due to varying conditions in the chamber and object reflectivity.

Innovation Solution

A gap measuring method and apparatus that use a laser to create laser line images on the surfaces of the support member and edge ring, adjust the camera settings based on the maximum width of the laser line images, and calculate the gap from the discontinuous region between the images.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a photographing module captures the gap between support member and edge ring under varying chamber conditions, then the measurement can be performed in different environments, but the measurement accuracy deteriorates due to changes in reflectivity and chamber conditions

Engineering Contradiction:

Improvemeasurement capability under varying chamber conditionsVSAvoidgap measurement accuracy

Core Design Contradiction:

Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The system dynamically adjusts photographing parameters (shutter speed, gain, exposure time) based on the captured laser line image characteristics. By calculating the maximum width of the laser line image and comparing it to preset ranges, the system automatically modifies photographing settings to optimize image quality and measurement accuracy under varying chamber conditions

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The system implements a feedback mechanism where the captured laser line image is analyzed to determine image quality, and based on this analysis, the photographing settings are adjusted for subsequent measurements. This closed-loop control ensures consistent measurement accuracy despite changes in chamber environment, reflectivity, and other varying conditions

Inventive Principle:

Principle #23Feedback

2Device complexity

If the photographing module uses fixed settings to capture laser line images, then the device complexity is reduced, but the measurement precision deteriorates when laser line width varies outside preset ranges

Engineering Contradiction:

Improvephotographing system simplicityVSAvoidgap measurement accuracy

Core Design Contradiction:

Device complexityVSMeasurement precision

Solution Approach 1:

The photographing module transitions from static fixed settings to dynamic adaptive settings. The system automatically adjusts photographing parameters based on real-time analysis of laser line image characteristics, allowing the measurement system to adapt to varying measurement conditions while maintaining operational simplicity through automated control

Inventive Principle:

Principle #15Dynamics

3Productivity

If the laser line image width is outside the preset range, then the measurement can proceed with initial settings, but the measurement precision deteriorates due to suboptimal image quality

Engineering Contradiction:

Improvemeasurement process continuityVSAvoidgap measurement accuracy

Core Design Contradiction:

ProductivityVSMeasurement precision

Solution Approach 1:

The system performs preliminary analysis of the laser line image to determine if the current photographing settings are appropriate. By calculating the maximum width of the laser line image and comparing it to preset ranges, the system proactively adjusts settings before performing the final gap measurement, ensuring optimal image quality and measurement accuracy

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method allows for accurate measurement of the gap by adjusting camera settings to optimize laser line image clarity, thereby improving measurement precision and reliability.

Implementation Method 1

obtaining a first image by capturing the equipment to be measured using a photographing module of a first setting while irradiating a laser to the equipment to be measured

Methodology Applied

Scientific EffectLaser: Laser

Implementation Method 2

the first image includes a first laser line image corresponding to a surface of the first member and a second laser line image corresponding to a surface of the second member

Methodology Applied

Scientific EffectLight reflection: Reflection

Data Source

PatentUS12313392B2Apparatus and method for measuring the gap

Publication Date: 2025.05.27 SYSTEM ENGINEERING MEGA SOLUTION CO LTD

AI summary

Provided is a gap measuring method capable of accurately measuring a gap between adjacent members. The gap measuring method includes preparing an equipment to be measured including a first member and a second member, obtaining a first image by capturing the equipment to be measured using a photographing module of a first setting while irradiating a laser to the equipment to be measured, wherein the first image includes a first laser line image corresponding to a surface of the first member and a second laser line image corresponding to a surface of the second member, modifying the photographing module from the first setting to a second setting based on a maximum width of the second laser line image in the first image, obtaining a second image by capturing the equipment to be measured using the photographing module of the second setting while irradiating a laser to the equipment to be measured, and calculating a gap between the first member and the second member based on a discontinuous region between the first laser line image and the second laser line image in the second image.