Two-Chamber Gas Discharge Laser Replenishment Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current dual-chamber gas discharge lasers require continuous measurement or estimation of halogen gas consumption in both the master oscillator and power amplifier chambers for gas replenishment, necessitating complex calculations and feedback loops, which disrupt operations and are inefficient.
Innovation Solution
Implementing a system that injects fixed amounts of non-halogen and halogen-containing gases into the chambers at regular intervals, eliminating the need for continuous measurement and feedback, with a controller managing the replenishment scheme to maintain optimal fluorine concentration in an open-loop configuration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If continuous measurement and feedback loops are used to control gas concentration, then gas replenishment precision is improved, but device complexity and operational disruption increase
Solution Approach 1:
The patent extracts the continuous measurement and feedback control components from the gas replenishment system, replacing them with a simpler timer-based open-loop control mechanism. This removes the complex sensors, measurement circuits, and feedback loops while maintaining acceptable gas concentration control through predetermined injection schedules
Solution Approach 2:
The system uses an internal timer mechanism that automatically triggers gas injection at predetermined intervals without requiring external measurement or feedback. The controller autonomously manages the gas replenishment process based on pre-programmed timing sequences, eliminating the need for continuous monitoring systems
2Measurement precision
If continuous measurement and feedback loops are used to control gas concentration, then gas replenishment accuracy is improved, but operational efficiency deteriorates
Solution Approach 1:
The patent implements periodic gas injection based on predetermined time intervals rather than continuous measurement cycles. The timer-based system triggers gas replenishment at regular, pre-determined intervals, eliminating the operational overhead of continuous sensing and feedback processing while maintaining sufficient gas concentration control for laser operation
3Reliability
If regular refill schedule is used to maintain laser operation, then reliability is improved, but loss of time increases
Solution Approach 1:
The system performs preliminary gas injection at predetermined intervals before the laser actually requires gas replenishment. The timer-based controller proactively manages gas concentration by injecting at scheduled times, preventing the need for urgent refills that would cause operational interruptions and extending the time between maintenance events
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach simplifies gas control, extends operational time between refills, and maintains consistent laser performance by keeping fluorine levels within acceptable bounds, allowing for longer continuous operation without the need for frequent shutdowns.
Implementation Method 1
as the light source discharges energy across its electrodes to produce light, the halogen gas, fluorine in the case of ArF or KrF lasers, is depleted
Data Source
AI summary
Methods and systems for controlling the gas concentrations in the chambers of a two chamber gas discharge laser such as an excimer laser are disclosed. A first set of inject opportunities is selected for the laser chamber of the master oscillator, and a second set of inject opportunities is selected for the laser chamber of the power amplifier. At each selected inject opportunity for the master oscillator, its laser chamber receives an inject containing a fixed amount of a non-halogen containing gas, and a calculated amount of a halogen containing gas. At the selected inject opportunities for the power amplifier, its laser chamber receives a fixed amount of the halogen containing gas, and may also receive a fixed amount of the non-halogen containing gas.