Laser Gas Sensor for Substrate Processing Temperature and Concentration
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Solution Overview
Problem
Existing substrate processing technologies face challenges in accurately measuring the temperature and concentration of processing gases in real-time during substrate processing, which is crucial for controlling and designing the processing on semiconductor wafers.
Innovation Solution
The apparatus employs laser light with wavelengths changing within two different preset ranges to calculate the temperature and concentration of processing gases using absorption spectrometry, allowing for simultaneous measurement of temperature and concentration distributions within the processing space.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional optical detection devices are used to measure gas concentration, then measurement capability is provided, but the ability to simultaneously measure both temperature and concentration is insufficient
Solution Approach 1:
The patent applies parameter changes by utilizing laser light with different wavelengths (first wavelength range and second wavelength range) to measure different parameters. By changing the wavelength parameter of the laser light, the system can selectively measure either temperature or concentration of the processing gas, achieving dual-parameter measurement capability with a single integrated system.
Solution Approach 2:
The patent implements universality by designing a single measurement system that can perform multiple functions: measuring both temperature and concentration of processing gas. The light emitter can output laser light in different wavelength ranges, and the light receiver processes signals from both wavelength ranges to calculate both temperature and concentration, making the system versatile for multiple measurement tasks.
2Adaptability or versatility
If laser light with multiple wavelengths is used to measure both temperature and concentration, then measurement versatility is improved, but device complexity increases
Solution Approach 1:
The patent applies merging by combining the light source, light emitter, light receiver, temperature calculator, and concentration calculator into an integrated measurement system. The light source supplies laser light in both first and second wavelength ranges through a single light emitter, and the light receiver receives signals from both wavelengths, with calculations performed by integrated calculators, reducing overall system complexity despite multi-wavelength functionality.
Solution Approach 2:
The patent implements universality by designing a single measurement system that can perform multiple functions: measuring both temperature and concentration of processing gas. The light source can output laser light in different wavelength ranges, and the light receiver processes signals from both wavelength ranges to calculate both temperature and concentration, making the system versatile for multiple measurement tasks.
3Measurement precision
If absorption spectrum analysis is performed to calculate temperature, then temperature measurement accuracy is improved, but measurement time and processing complexity increase
Solution Approach 1:
The patent applies preliminary action by pre-storing the relationship between absorption spectra and temperature in the temperature calculator. The system has pre-established the correlation between absorption spectrum characteristics and temperature values, allowing for rapid temperature calculation when laser light passes through the processing gas, reducing measurement and processing time while maintaining accuracy.
Solution Approach 2:
The patent replaces complex mechanical measurement systems with optical-based absorption spectrum analysis. Instead of using physical temperature sensors that may require contact and complex calibration, the system uses laser light absorption characteristics to determine temperature, simplifying the measurement mechanism while improving accuracy and reducing measurement time.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enables precise and real-time measurement of temperature and concentration of processing gases, improving the control and quality of substrate processing by providing accurate data for process optimization.
Implementation Method 1
a light source configured to supply, to the light emitter via a light waveguide, laser light of a wavelength that changes within a first wavelength range
Implementation Method 2
an absorption spectrum of laser light within the first wavelength range received by the light receiver and an absorption spectrum of laser light within the second wavelength range
Data Source
AI summary
Provided is a technique for using laser light to measure a temperature and concentration of a processing gas supplied to a processing space where a substrate processing is performed. A processing gas supply provided in an apparatus for processing a substrate supplies the processing gas to the processing space, and a light emitter emits laser light, having wavelengths that change within different wavelength ranges, to the processing space where the processing gas is supplied. A light receiver receives the laser light that has passed through the processing space, a temperature calculator calculates the temperature of the processing gas based on an absorption spectrum of laser light within each wavelength range, and a concentration calculator calculates the concentration of the processing gas based on an absorbance of laser light having a specific wavelength within the wavelength ranges.