Segmented Laser Heater Block for Uniform Substrate Heating
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional substrate heating devices using halogen lamps struggle with temperature measurement accuracy and uniformity due to the translucent nature of silicon wafers at low temperatures and the inability to control heating areas independently, leading to non-uniform heating and potential substrate damage.
Innovation Solution
A heater block with a first and second laser module, each divided into multiple control areas, is powered independently by separate power sources, and combined with a pyrometer system to measure and control temperature accurately and uniformly across subdivided areas.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If halogen lamps are used for substrate heating, then heating can be performed, but temperature measurement accuracy deteriorates due to light transmission through translucent silicon wafers
Solution Approach 1:
The heater block is divided into multiple independent control areas (first control area, second control area, third control area) with separate heating elements and power supply circuits, allowing localized temperature control and measurement without interference from transmitted light
Solution Approach 2:
Different control areas are assigned different heating powers and temperature control parameters according to their specific requirements, enabling precise local temperature measurement and control while compensating for the translucent substrate issue in each region
2Temperature
If halogen lamps are used for heating, then heating function is provided, but control precision deteriorates because the entire lamp cannot be divided into control areas
Solution Approach 1:
The heating system is segmented into multiple independent control areas, each with its own heating element and power supply circuit, enabling precise local temperature control while maintaining manageable system complexity through modular design
Solution Approach 2:
The heating system dynamically adjusts power distribution to different control areas based on real-time temperature feedback, allowing flexible and precise temperature control across different regions of the substrate
3Temperature
If the entire substrate is heated uniformly, then heating is provided, but temperature uniformity deteriorates due to heat loss at edges and centers
Solution Approach 1:
Different control areas are assigned different heating powers to compensate for positional heat loss characteristics - edge areas receive higher power to compensate for heat loss, while center areas receive appropriate power levels, achieving uniform temperature distribution across the entire substrate
Solution Approach 2:
The system uses temperature detection circuits to monitor temperatures in different control areas and provides feedback to the power supply control circuit, which dynamically adjusts heating power to maintain uniform temperature across the substrate despite varying heat loss at different positions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves precise temperature control and uniformity across the substrate, reducing power consumption and preventing damage by using VCSELs, which allow accurate temperature measurement and independent control of heating zones, enhancing process reliability.
Implementation Method 1
a first laser module having a plurality of laser cells; a second laser module having a plurality of laser cells and disposed around the first laser module
Implementation Method 2
a temperature of the substrate is measured in a non-contact manner using a temperature measuring device such as a pyrometer. The pyrometer may collect radiant energy emitted from the substrate and measure the temperature of the substrate in a non-contact manner based on a black body radiation temperature relationship
Data Source
AI summary
The present invention relates to a heater block capable of precise control of a heating temperature and a substrate device including the heater block. The heater block may include: a first laser module having multiple laser cells; a second laser module which has multiple laser cells and is provided around the first laser module; and a first and a second power source part for independently supplying power to the first laser module and the second laser module, respectively, wherein, at least one among the first laser module and the second laser module is divided into multiple control areas each of which includes the one or more laser cells sharing an input terminal to which power is input, and the multiple control areas are controlled independently from each other.