Evaluation Jig for Laser Height Detection Using Virtual Surface
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Solution Overview
Problem
Existing laser processing apparatuses require an evaluation plate-shaped body with known height position information to evaluate the accuracy of the height position detection unit, limiting the ability to assess detection accuracy without such a reference.
Innovation Solution
An evaluation jig and method that utilize a to-be-irradiated surface movable in a direction orthogonal to itself, controlled by an actuator such as a piezo actuator or voice coil motor, allowing the detection laser beam to simulate the height position detection of a workpiece without a preliminary known evaluation plate, enabling evaluation of the height position detection unit's accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If an evaluation plate-shaped body with known height position information is used to evaluate the height position detection unit, then the detection accuracy can be assessed, but the device complexity and requirement for preliminary known reference objects increases
Solution Approach 1:
The invention creates a virtual copy of the workpiece surface using a mirror that reflects the detection laser beam. Instead of requiring a physical evaluation plate with known height positions, the system generates a virtual reference surface through optical reflection, thereby simplifying the evaluation system while maintaining measurement precision
Solution Approach 2:
The invention introduces a mirror as an intermediary element between the detection laser beam and the evaluation surface. The mirror enables the laser beam to interact with a virtual image of the workpiece surface, serving as a mediator that eliminates the need for complex physical reference standards while preserving detection accuracy
2Reliability
If a detection laser beam is applied to evaluate the height position detection unit, then the unit's performance can be assessed, but the measurement process becomes complex without a standardized reference object
Solution Approach 1:
The invention performs preliminary action by pre-positioning the mirror to create a virtual image of the workpiece surface at a known location. This preliminary setup establishes a reference framework before the actual detection measurement, making the evaluation process more reliable and less difficult
Solution Approach 2:
The invention transitions from direct physical measurement to optical dimension measurement by using the mirror to create a virtual image. This dimensional transformation allows the detection laser beam to measure height positions through optical path differences rather than direct physical contact, simplifying the measurement process while maintaining reliability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the evaluation of the height position detection unit without relying on an evaluation plate with known height position information, allowing for accurate detection simulation and assessment of the unit's performance.
Implementation Method 1
an actuator that moves the to-be-irradiated surface in a direction orthogonal to the to-be-irradiated surface
Implementation Method 2
an actuator that moves the to-be-irradiated surface in a direction orthogonal to the to-be-irradiated surface
Implementation Method 3
a height position detection unit that applies a detection laser beam to the workpiece held by the chuck table through the focusing unit to detect a height position of an upper surface of the workpiece
Data Source
AI summary
Disclosed herein is an evaluation jig that is a jig to be used for evaluation of a height position detection unit that detects the height position of a holding surface of a chuck table of a laser processing apparatus. The evaluation jig includes a to-be-irradiated surface which is to be irradiated with a detection laser beam, an actuator that moves the to-be-irradiated surface in a Z-axis direction, a base section that supports the actuator and is mounted on the holding surface of the chuck table, and a control unit that controls movement of the actuator.