Laser-Induced Graphene Bending Sensor for Flexible Flow Measurement

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Solution Overview

Problem

Existing flow sensors are expensive, rigid, and require complex manufacturing processes, limiting their use in flexible and cost-effective applications, especially in biocompatible and micro/macro-scale flow measurements.

Innovation Solution

A flexible bending sensor utilizing a polyimide substrate with a laser-induced graphene electrode, which changes resistivity with bending, allowing for accurate and efficient flow measurement through piezoresistive properties, and can be fabricated using a simple and cost-effective process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional flow sensors are used, then measurement accuracy is achieved, but device rigidity and manufacturing complexity increase

Engineering Contradiction:
Improveflow measurement accuracyVSAvoidmanufacturing process complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent replaces complex mechanical sensing systems with a piezoresistive membrane that directly converts pressure to electrical signals through resistance changes. This substitution of mechanical measurement mechanisms with electrical properties simplifies the overall device structure while maintaining measurement accuracy.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent utilizes changes in electrical resistance parameters of the piezoresistive material in response to mechanical deformation. By monitoring resistance variations caused by pressure-induced strain, the system achieves accurate flow measurement through electrical parameter changes rather than mechanical readout systems.

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If conventional flow sensors are used, then measurement functionality is provided, but flexibility and biocompatibility are compromised

Engineering Contradiction:
Improveflexibility and biocompatibilityVSAvoidmanufacturing simplicity
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The patent employs a thin piezoresistive membrane as the sensing element, which inherently provides flexibility and conformability. This thin-film structure can be adapted to various surfaces and geometries while maintaining sensing functionality, enabling applications in flexible and biocompatible devices.

Inventive Principle:
Principle #30Flexible shells and thin films

Solution Approach 2:

The patent integrates piezoresistive material within a membrane structure, creating a composite sensing element that combines mechanical flexibility with electrical sensitivity. This composite approach allows the sensor to maintain structural integrity while achieving the required flexibility and biocompatibility for medical and flexible electronic applications.

Inventive Principle:
Principle #40Composite materials

3Measurement precision

If piezoresistive materials are deposited on cantilevers, then microscale flow measurement is enabled, but device rigidity and cost increase

Engineering Contradiction:
Improvemicroscale flow measurement capabilityVSAvoiddevice rigidity
Core Design Contradiction:
Measurement precisionVSStrength

Solution Approach 1:

The patent replaces rigid cantilever structures with flexible thin-film membranes that are suitable for microscale applications. This transition from rigid to flexible structures enables microscale flow measurement while reducing device rigidity and associated manufacturing costs.

Inventive Principle:
Principle #30Flexible shells and thin films

Solution Approach 2:

The patent employs a simple membrane-based piezoresistive sensor that can be manufactured at low cost using conventional thin-film deposition techniques. The straightforward structure and manufacturing process make the device economically viable for disposable or single-use applications in microscale flow measurement.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The sensor provides a cost-effective, flexible, and biocompatible solution for measuring flow rates across various scales with high sensitivity and versatility, capable of operating in both gaseous and liquid media, with ultra-fast response and non-linear temperature coefficient characteristics.

Implementation Method 1

a step of providing a laser device at a given distance from the flexible substrate, and a step of carbonizing with the laser a portion of the flexible substrate to form a laser-induced graphene electrode

Methodology Applied
Scientific EffectLaser heating: Laser

Implementation Method 2

carbonizing with the laser a portion of the flexible substrate to form a laser-induced graphene electrode

Methodology Applied
Scientific EffectCarbonization: Pyrolysis

Implementation Method 3

A bending of the flexible substrate and the laser-induced graphene electrode changes a resistivity of the laser-induced graphene electrode, which is indicative of an amount of bending

Methodology Applied
Scientific EffectPiezoresistive effect: Piezoresistive Effect

Data Source

PatentUS11493321B2Laser-induced graphene-based bending sensor and method
Publication Date: 2022.11.08 KING ABDULLAH UNIV OF SCI & TECH
  • US11493321B2 patent drawing
  • US11493321B2 patent drawing
  • US11493321B2 patent drawing

AI summary

A bending sensor includes a flexible substrate made of polyimide; a laser-induced graphene electrode formed into a top surface of the flexible substrate; and first and second pads formed as a laser-induced graphene into the top surface of the flexible substrate, wherein the first and second pads are in electrical contact with the laser-induced graphene electrode. A bending of the flexible substrate and the laser-induced graphene electrode changes a resistivity of the laser-induced graphene electrode, which is indicative of an amount of bending.