Laser Interferometry Position Detection for Large Holder Strokes

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Solution Overview

Problem

Existing laser light interferometry detection systems for semiconductor and integrated circuit manufacturing face limitations in accuracy and efficiency due to lost interferometry signals when displacement strokes exceed mirror dimensions, requiring multiple sensors and complex recalculations, which increase cost and risk of accuracy errors.

Innovation Solution

A position detection system using laser light interferometry with a holder-mounted optical device that emits laser beams parallel to the XY plane and perpendicular to the first coordinate axis, allowing continuous measurement by displacing with the holder, and incorporating a composite mirror for simultaneous Y and Z position measurement, reducing the need for additional mirrors and sensors.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If additional measuring mirrors are positioned within the working space to cover large displacement distances, then the measurement range is improved, but the work volume is occupied and the system complexity increases

Engineering Contradiction:
Improvemeasurement rangeVSAvoidwork volume occupation
Core Design Contradiction:
Adaptability or versatilityVSVolume of stationary object

Solution Approach 1:

Instead of positioning additional measuring mirrors in the working space to extend measurement range, the patent inverts the approach by making the optical device movable and attaching it to the holder. This allows the measurement system to move with the holder rather than having stationary mirrors cover the entire workspace, thus avoiding work volume occupation while maintaining adaptability for large displacement distances.

Inventive Principle:
Principle #13The other way round (Inversion)

2Adaptability or versatility

If multiple interferometer sensors are implemented to cover large strokes, then the measurement coverage is improved, but the device complexity and cost increase

Engineering Contradiction:
Improvemeasurement coverageVSAvoidsystem complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent applies dynamics by making the optical device movable rather than stationary. The optical device is attached to the holder and moves together with it during displacement. This dynamic configuration allows a single optical device to cover large measurement strokes without requiring multiple stationary interferometer sensors, thereby reducing system complexity while maintaining measurement coverage.

Inventive Principle:
Principle #15Dynamics

3Stability of the object's composition

If interferometer sensors are fixed to the frame, then the system stability is improved, but the measurement area coverage is limited to mirror size

Engineering Contradiction:
Improvesystem stabilityVSAvoidmeasurement area coverage
Core Design Contradiction:
Stability of the object's compositionVSArea of stationary object

Solution Approach 1:

The patent resolves this contradiction by making the optical device dynamic rather than fixed. The optical device is attached to the holder and moves together with it, allowing the measurement area to expand beyond the static mirror size limitation. This maintains system stability through controlled movement while significantly increasing the measurement area coverage for large displacement distances.

Inventive Principle:
Principle #15Dynamics

4Length of moving object

If the holder stroke is larger than the mirror size, then the displacement measurement capability is improved, but the interferometry signals are lost

Engineering Contradiction:
Improveholder strokeVSAvoidinterferometry signal loss
Core Design Contradiction:
Length of moving objectVSLoss of information

Solution Approach 1:

The optical device serves itself by being attached to the holder. As the holder moves through large displacements, the optical device moves with it, maintaining the interferometry signal connection throughout the entire stroke. This self-service configuration eliminates signal loss that would occur with stationary mirrors, allowing the system to handle holder strokes larger than the original mirror size.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Ensures accurate, real-time measurement of holder positions and displacements without losing reference points, simplifying optics, reducing constructional dimensions, and minimizing work volume interference in manufacturing processes.

Implementation Method 1

position detection system using laser light interferometry for measuring the positions and displacements of an object

Methodology Applied
Scientific EffectLaser light interferometry: Interference

Implementation Method 2

each optical device structured to emit and direct a respective laser light beam to and from a respective measuring mirror

Methodology Applied
Scientific EffectLaser: Laser

Data Source

PatentUS20250297851A1Position detection system using laser light interferometry
Publication Date: 2025.09.25 VDL ENABLING TECH GRP BV
  • US20250297851A1 patent drawing
  • US20250297851A1 patent drawing
  • US20250297851A1 patent drawing

AI summary

The invention relates to a position detection system using laser light interferometry for measuring the positions and displacements of an object relative to and within an XYZ system of coordinates, the system comprising a frame and a holder comprising a mounting surface for the object, the mounting surface being oriented in the XY plane of the XYZ system of coordinates, wherein the holder is structured to be displaced at least between a first operational position and a second operational position within the XY plane relative to the frame. Such laser light interferometry detection systems can be implemented, for example, in semiconductor and integrated circuit manufacturing processes.