Laser Interferometry Position Detection for Large Holder Strokes
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Solution Overview
Problem
Existing laser light interferometry detection systems for semiconductor and integrated circuit manufacturing face limitations in accuracy and efficiency due to lost interferometry signals when displacement strokes exceed mirror dimensions, requiring multiple sensors and complex recalculations, which increase cost and risk of accuracy errors.
Innovation Solution
A position detection system using laser light interferometry with a holder-mounted optical device that emits laser beams parallel to the XY plane and perpendicular to the first coordinate axis, allowing continuous measurement by displacing with the holder, and incorporating a composite mirror for simultaneous Y and Z position measurement, reducing the need for additional mirrors and sensors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If additional measuring mirrors are positioned within the working space to cover large displacement distances, then the measurement range is improved, but the work volume is occupied and the system complexity increases
Solution Approach 1:
Instead of positioning additional measuring mirrors in the working space to extend measurement range, the patent inverts the approach by making the optical device movable and attaching it to the holder. This allows the measurement system to move with the holder rather than having stationary mirrors cover the entire workspace, thus avoiding work volume occupation while maintaining adaptability for large displacement distances.
2Adaptability or versatility
If multiple interferometer sensors are implemented to cover large strokes, then the measurement coverage is improved, but the device complexity and cost increase
Solution Approach 1:
The patent applies dynamics by making the optical device movable rather than stationary. The optical device is attached to the holder and moves together with it during displacement. This dynamic configuration allows a single optical device to cover large measurement strokes without requiring multiple stationary interferometer sensors, thereby reducing system complexity while maintaining measurement coverage.
3Stability of the object's composition
If interferometer sensors are fixed to the frame, then the system stability is improved, but the measurement area coverage is limited to mirror size
Solution Approach 1:
The patent resolves this contradiction by making the optical device dynamic rather than fixed. The optical device is attached to the holder and moves together with it, allowing the measurement area to expand beyond the static mirror size limitation. This maintains system stability through controlled movement while significantly increasing the measurement area coverage for large displacement distances.
4Length of moving object
If the holder stroke is larger than the mirror size, then the displacement measurement capability is improved, but the interferometry signals are lost
Solution Approach 1:
The optical device serves itself by being attached to the holder. As the holder moves through large displacements, the optical device moves with it, maintaining the interferometry signal connection throughout the entire stroke. This self-service configuration eliminates signal loss that would occur with stationary mirrors, allowing the system to handle holder strokes larger than the original mirror size.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures accurate, real-time measurement of holder positions and displacements without losing reference points, simplifying optics, reducing constructional dimensions, and minimizing work volume interference in manufacturing processes.
Implementation Method 1
position detection system using laser light interferometry for measuring the positions and displacements of an object
Implementation Method 2
each optical device structured to emit and direct a respective laser light beam to and from a respective measuring mirror
Data Source
AI summary
The invention relates to a position detection system using laser light interferometry for measuring the positions and displacements of an object relative to and within an XYZ system of coordinates, the system comprising a frame and a holder comprising a mounting surface for the object, the mounting surface being oriented in the XY plane of the XYZ system of coordinates, wherein the holder is structured to be displaced at least between a first operational position and a second operational position within the XY plane relative to the frame. Such laser light interferometry detection systems can be implemented, for example, in semiconductor and integrated circuit manufacturing processes.


