Laser Ion Source Particulate Control via Valve and Shutter
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Solution Overview
Problem
Laser ion sources generate particulates during irradiation, which accumulate and affect the vacuum evacuation system, leading to reduced efficiency and maintenance complexity, especially when using turbo-molecular pumps and connected devices.
Innovation Solution
Incorporating a valve and shutter mechanism that controls the ion beam outlet, allowing only necessary ions to be extracted while preventing particulates from entering the downstream devices, and using a baffle plate and labyrinth structure to minimize particulate flow into the vacuum evacuation system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a laser ion source is used to generate high-density ion beams, then ion beam quality is improved, but particulates are generated that accumulate and affect vacuum evacuation devices
Solution Approach 1:
The patent extracts and removes particulates from the vacuum chamber using a magnetic field-based particulate removal device. The device selectively removes particulates generated during laser irradiation before they can accumulate and affect vacuum evacuation devices, while allowing ions to pass through to the linear accelerator.
Solution Approach 2:
The patent introduces a magnetic field as an intermediary substance between the laser irradiation zone and the vacuum evacuation system. This magnetic field acts as a mediator that captures and removes particulates without directly interfering with the ion beam generation process or the vacuum evacuation function.
2Reliability
If particulates are removed from the ion source, then vacuum system reliability is improved, but device complexity increases due to additional components
Solution Approach 1:
The patent designs the particulate removal device to serve multiple functions: it removes particulates from the vacuum chamber, protects vacuum evacuation devices from contamination, and maintains ion beam quality. This multi-functionality reduces the need for separate dedicated components for each function.
Solution Approach 2:
The patent changes the magnetic field parameters (strength, distribution, orientation) to optimize particulate removal efficiency while minimizing interference with ion beam extraction. By adjusting these parameters, the system achieves effective particulate control without requiring excessively complex magnetic field configurations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively confines particulates within the ion source, reducing soiling and maintenance costs, and enhancing the vacuum system's efficiency by preventing particulates from entering the linear accelerator and vacuum pumps, thus maintaining a cleaner environment for ion beam generation.
Implementation Method 1
a laser ion source which generates ions by application of a laser beam
Implementation Method 2
ionizes the target by laser light energy
Implementation Method 3
an extraction electrode which extracts ions from the irradiation box to form an ion beam
Data Source
AI summary
According to one embodiment, a laser ion source is configured to generate ions by application of a laser beam, the laser ion source including a case to be evacuated, an irradiation box disposed in the case and including a target which generates ions by irradiation of laser light, an ion beam extraction mechanism which electrostatically extracts ions from the irradiation box and guides the ions outside the case as an ion beam, a valve provided to an ion beam outlet of the case, the valve being opened at ion beam emission and being closed at other times, and a shutter provided between the valve and the irradiation box, the shutter being intermittently opened at ion beam emission and being closed at other times.