Laser Processing Lens Displacement Adjustment
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Solution Overview
Problem
Conventional laser processing techniques face challenges in maintaining the precision of the laser beam converging point, especially when processing objects with irregular surfaces, leading to deviations and inefficiencies due to the need for time-consuming and labor-intensive exchanges of measurement and processing tools.
Innovation Solution
A method and apparatus that utilize a single lens to converge both processing and measurement laser beams, allowing for continuous displacement measurement and adjustment of the beam's converging point along the object's surface, ensuring accurate positioning and efficient processing by moving the lens and object relative to each other while adjusting the gap between the lens and the surface.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If measurement means and processing means are exchanged to measure planarity accurately, then measurement precision is improved, but loss of time and device complexity increase
Solution Approach 1:
The patent applies multi-functionality by enabling the condenser lens to serve dual purposes: it converges both the measurement laser beam for displacement detection and the processing laser beam for material modification. This eliminates the need to exchange between separate measurement and processing tools, thereby reducing time loss while maintaining measurement precision through the same optical component.
Solution Approach 2:
The patent merges the measurement function and processing function into a single integrated system. The measurement laser beam and processing laser beam share the same condenser lens and optical path, combining previously separate measurement means and processing means into one unified apparatus that performs both functions simultaneously or sequentially without physical exchange.
2Manufacturing precision
If condenser lens is driven according to measured main surface height, then manufacturing precision is improved, but laser beam converging point deviation occurs in end parts
Solution Approach 1:
The patent applies preliminary action by performing displacement measurement of the main surface before laser processing begins. The measurement laser beam scans the entire main surface area first to detect height variations, and the condenser lens position is adjusted in advance based on these measurements. This ensures that when processing reaches the end parts, the lens is already positioned correctly to maintain converging point accuracy throughout the entire processing area.
Solution Approach 2:
The patent implements feedback control by continuously monitoring the main surface height through displacement measurement and using this information to adjust the condenser lens position dynamically. The measurement system provides real-time feedback on surface topography, and the control system responds by moving the lens to maintain optimal focus, thereby preventing converging point deviation in end parts during processing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach minimizes deviations of the laser beam converging point, enabling efficient and precise laser processing by accurately acquiring and adjusting to surface displacements, thereby improving processing efficiency and reducing the influence of surface irregularities.
Implementation Method 1
converging the first laser beam with a lens such that a converging point is positioned within the object
Implementation Method 2
converging the second laser beam with the lens
Implementation Method 3
detecting reflected light reflected by the main surface in response to the irradiation
Implementation Method 4
irradiating an object to be processed with a first laser beam... forming a modified region within the object along a line to cut
Data Source
AI summary
A laser processing method which can efficiently perform laser processing while minimizing the deviation of the converging point of a laser beam is provided.This laser processing method comprises a displacement acquiring step (S07 to S11) of irradiating an object to be processed with a rangefinding laser beam for measuring a displacement of a main surface of the object while converging the laser beam with a lens and acquiring the displacement of the main surface along a line to cut while detecting reflected light reflected by the main surface in response to the irradiation; and moves the processing objective lens and the object relative to each other along the main surface, while adjusting the gap between the processing objective lens and the surface according to the displacement acquired by the displacement acquiring step, thereby forming the modified region along the line to cut.