Laser Lens Temperature Stabilization via Mirror Reflection
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Solution Overview
Problem
Conventional laser irradiating devices face issues with focal distance fluctuations due to temperature changes in the condenser lens, leading to inefficiencies in maintaining consistent laser beam quality during the crystallization of amorphous silicon films, as the lens temperature takes longer to stabilize after irradiation cessation.
Innovation Solution
A laser irradiating method and device that utilize a first mirror for blocking and reflecting the laser beam to maintain lens temperature stability, combined with a second mirror for intensity adjustment and a focal distance measurement system, ensuring consistent focal distance and beam quality by heating the lens similarly to the irradiation process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If the lens temperature is maintained at a given temperature through indirect cooling from the side surface, then the focal distance stability is improved, but the operating efficiency deteriorates due to long cooling time after irradiation
Solution Approach 1:
The invention converts the harmful heat generated by laser absorption in the lens into a beneficial effect by using the same laser beam to heat the lens back to its optimal temperature after cooling. The mirror reflects the laser beam back through the lens, utilizing the laser's energy to maintain lens temperature and focal distance stability, thereby improving operating efficiency without compromising focal distance stability
2Temperature
If the lens is indirectly cooled from the side surface, then the temperature control is achieved, but the temperature rise time is shorter than cooling time causing focal distance fluctuation
Solution Approach 1:
The invention maintains continuous temperature control of the lens by using the laser beam to heat the lens during periods when it cools down. The mirror system enables the laser beam to continuously pass through the lens, ensuring the lens temperature remains stable and focal distance does not fluctuate, achieving both temperature control and focal distance stability simultaneously
3Stability of the object's composition
If multiple lenses with different temperature characteristics are combined, then the focal distance stability is partially improved, but the suppression effect is insufficient
Solution Approach 1:
The invention changes the temperature parameter of the lens by using laser heating to maintain the lens at its optimal temperature. This active temperature control through parameter change (using laser heating) is more effective than passive compensation through multiple lenses, achieving better focal distance stability without increasing device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach stabilizes the lens temperature without affecting the irradiation process, preventing defocused beams and ensuring high-quality object manufacturing by maintaining constant focal distance and beam intensity, reducing waste and improving operational efficiency.
Implementation Method 1
a first mirror that can be located at a reflection position at which an optical path between the lens and the object to be irradiated is blocked and the processing laser beam with a given reflectivity is reflected
Implementation Method 2
a second mirror that reflects the processing laser beam with a given reflectivity is arranged perpendicularly to an optical axis of the processing laser beam which is reflected by the first mirror
Implementation Method 3
a part of laser beam is absorbed by the lens and transformed into heat to increase the temperature of the lens when the laser beam passes through the condenser lens
Implementation Method 4
the condenser lens is indirectly heat-insulated by the aid of a temperature control device that is attached to the lens tube
Data Source
AI summary
A first mirror (5) that can be located at a reflection position (I) at which an optical path is blocked and a laser beam (a) is reflected, and a second mirror (6) that reflects the laser beam (a) which is reflected by the first mirror (5) are disposed between the condenser lens (2) and the object to be irradiated (4). The first mirror (5) is located at the reflection position (I) so that the laser beam (a) that is transmitted through the condenser lens (2) is sequentially reflected by the first and second mirrors (5 and 6), and an intensity of the laser beam (a) that is again reflected by the first mirror (5) is made to coincide with an intensity of the laser beam (a) that is reflected from the object to be irradiated (4), and the condenser lens (2) is heated in the same manner that the processing laser beam (a) is transmitted through the condenser lens (2) and irradiated on the object to be irradiated (4).