Laser Lift-Off Inspection and Dust Removal for Defect-Free Separation
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Solution Overview
Problem
Existing laser lift-off apparatuses face failures in separation due to foreign matter adhering to substrates, which absorbs laser light and causes separation failures.
Innovation Solution
A laser irradiation system with an observation apparatus to capture images of the workpiece, a dust collecting mechanism to remove foreign matter, and a control unit to manage conveyance based on defect detection, ensuring only non-defective substrates are irradiated with laser light.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the substrate is irradiated with laser light for separation, then the separating layer can be removed, but foreign matter on the substrate absorbs laser light and causes separation failure
Solution Approach 1:
The observation apparatus inspects the substrate for foreign matter before laser irradiation. The control unit identifies regions with foreign matter and excludes them from laser irradiation, performing the inspection action in advance to prevent separation failure
Solution Approach 2:
The foreign matter's property of absorbing laser light is utilized beneficially for inspection. The observation apparatus detects foreign matter by capturing light absorption characteristics, converting the harmful absorption property into a useful detection mechanism
2Productivity
If all substrates are irradiated with laser light, then processing can be continuous, but defective substrates cause separation failure and waste resources
Solution Approach 1:
The observation apparatus provides feedback information about foreign matter presence to the control unit. Based on this feedback, the control unit dynamically adjusts the laser irradiation plan, irradiating only non-defective regions to avoid wasting laser energy while maintaining processing efficiency
Solution Approach 2:
Instead of uniformly irradiating the entire substrate, the system applies laser irradiation selectively to specific regions determined to be free of foreign matter. This localized approach ensures laser energy is concentrated only where separation can succeed
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Improves the productivity of the laser lift-off process by preventing separation failures and enabling accurate defect detection and removal of foreign matter, thereby enhancing the efficiency of the manufacturing process.
Implementation Method 1
an observation apparatus configured to capture an image of the workpiece by detecting light from the workpiece being conveyed
Implementation Method 2
a laser irradiation unit configured to irradiate the workpiece, which is inspected by the observation apparatus, with a laser light
Implementation Method 3
a substrate is irradiated with a linear laser light... the substrate is irradiated with the laser light while the substrate is being conveyed
Implementation Method 4
a dust collecting mechanism configured to suck gas in a periphery of an irradiation region of the laser light
Implementation Method 5
when a foreign matter adheres to a substrate, the laser light is absorbed by the foreign matter
Data Source
AI summary
A laser irradiation system (1) includes: a conveyance stage (150); an observation apparatus (110) that captures an image of a workpiece; a laser irradiation unit (170) that irradiates the workpiece, which is inspected by the observation apparatus, with a laser light; a dust collecting mechanism (130) that sucks gas in a periphery of an irradiation region of the laser light; a processing unit (20) that determines whether or not the workpiece is defective based on a captured image of the workpiece captured before the workpiece is irradiated with the laser light; and a control unit that controls the conveyance stage so that the workpiece is not conveyed toward the laser irradiation unit when it is determined that the workpiece is defective.