Laser Lift-Off Imaging for Separation Layer State Detection

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Solution Overview

Problem

Existing laser lift-off devices do not efficiently derive information on the state of the separation layer irradiated with laser light, lacking effective monitoring and analysis capabilities.

Innovation Solution

A laser lift-off device equipped with an imaging device and a processing unit that acquires images of the separation layer and inputs them into a learning model to determine the state of the separation layer, using convolutional neural networks to output information on the separation state, enabling efficient derivation and monitoring of the separation process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of information

If traditional imaging methods are used to monitor the separation layer, then the device structure remains simple, but the ability to derive information on the state of the separation layer is insufficient

Engineering Contradiction:
Improveinformation on separation layer stateVSAvoiddevice structure
Core Design Contradiction:
Loss of informationVSDevice complexity

Solution Approach 1:

The patent introduces a learning model as an intermediary between the imaging device and the analysis system. The learning model processes images of the separation layer and outputs meaningful information about its state (intact, partially separated, or fully separated). This intermediary enables efficient information derivation without requiring complex manual analysis systems, thus resolving the contradiction between information quality and device complexity.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Productivity

If manual analysis of separation layer images is used, then device complexity is low, but productivity and efficiency are reduced

Engineering Contradiction:
Improveefficiency of deriving separation layer informationVSAvoidprocessing system complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent replaces manual mechanical analysis of separation layer images with an automated learning model-based system. The learning model automatically processes images and determines the separation state, eliminating the need for manual inspection. This substitution significantly improves productivity and efficiency while the modular design of the learning model keeps the added complexity manageable.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Manufacturing precision

If real-time monitoring of separation layer is implemented, then manufacturing precision is improved, but use of energy and computational resources increases

Engineering Contradiction:
Improveaccuracy of separation state determinationVSAvoidcomputational energy consumption
Core Design Contradiction:
Manufacturing precisionVSUse of energy by moving object

Solution Approach 1:

The patent implements real-time monitoring by processing images frame-by-frame or at selected intervals during the laser lift-off process, rather than analyzing the entire process continuously at maximum resolution. The learning model processes only the necessary image data to determine separation state, providing accurate real-time information while optimizing computational energy consumption by avoiding unnecessary processing of redundant data.

Inventive Principle:
Principle #16Partial or excessive action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution allows for accurate and efficient determination of the separation state, preventing separation failures and improving the overall manufacturing process by providing real-time monitoring and data-driven decision-making.

Implementation Method 1

irradiates a separation layer (work) formed on a substrate with a laser beam from the substrate-side and separates the separation layer from a substrate

Methodology Applied
Scientific EffectLaser heating: Laser

Implementation Method 2

irradiates a separation layer (work) formed on a substrate with a laser beam from the substrate-side and separates the separation layer from a substrate

Methodology Applied
Scientific EffectThermal separation: Heating

Data Source

PatentUS20240420304A1Laser Lift-Off Device, Information Processing Method and Program
Publication Date: 2024.12.19 JSW AKTINA SYST CO LTD
  • US20240420304A1 patent drawing
  • US20240420304A1 patent drawing
  • US20240420304A1 patent drawing

AI summary

A laser lift-off device irradiating a work having a substrate and a separation layer formed on the substrate with laser light to separate the separation layer from the substrate comprises: an imaging device that takes an image of the work irradiated with laser light; and a processing unit that performs processing based on an image taken by the imaging device, and the processing unit acquires an image of a work taken by the imaging device, inputs the acquired image of the work to a learning model that, if an image of a work is input, outputs information related to a state of a separation layer of the work, to derive information related to a state of the separation layer, and outputs the derived information related to the state of the separation layer.