Laser Machining Aberration Correction for Modified Spot Accuracy
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Solution Overview
Problem
The conventional laser processing method can result in the 'airshot phenomenon' where no modified spot is formed when laser light is converged at an object, leading to inaccurate formation of modified spots.
Innovation Solution
Correcting the aberration of laser light to locate the converging point near the laser light entrance surface within the object, specifically within 10% of the thickness or 10 μm or less from the surface, prevents the airshot phenomenon and ensures accurate formation of modified spots.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If laser light is converged at the laser light entrance surface of the object, then the modified spot can be formed at the desired location, but the airshot phenomenon occurs causing inaccurate formation of modified spots
Solution Approach 1:
The patent applies preliminary action by pre-correcting the aberration of laser light using a spatial light modulator before the light reaches the object. The aberration correction is performed in advance to ensure that the laser light converges accurately at the intended location within the object, preventing the airshot phenomenon from occurring and ensuring reliable formation of modified spots at the desired positions
Solution Approach 2:
The patent changes the optical parameters of the laser light by adjusting the aberration correction amount using a spatial light modulator. By dynamically adjusting the wavefront correction parameters, the system optimizes the convergence point location and prevents the airshot phenomenon, thereby achieving both high precision and reliability in modified spot formation
2Manufacturing precision
If aberration correction is applied to locate the converging point near the entrance surface, then the airshot phenomenon is restrained, but the device complexity increases due to additional optical components
Solution Approach 1:
The spatial light modulator serves multiple functions: it corrects optical aberrations, adjusts the convergence point location, and prevents the airshot phenomenon. By consolidating these functions into a single device, the patent reduces the need for multiple separate optical components, thereby managing device complexity while achieving high precision in modified spot formation
Solution Approach 2:
The patent replaces complex mechanical adjustment systems with a spatial light modulator that uses optical field modulation to achieve aberration correction and convergence point control. This substitution of mechanical systems with optical field control reduces mechanical complexity while maintaining or improving precision in modified spot formation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for precise formation of modified spots, enabling accurate cutting and processing of objects like quartz by restraining the airshot phenomenon and improving processing quality.
Implementation Method 1
a spatial light modulator for correcting an aberration of the laser light
Implementation Method 2
correcting an aberration of the laser light such as to locate a converging point of the laser light near the laser light entrance surface within the object
Implementation Method 3
a condenser optical system for converging the laser light oscillated by the laser light source into the object on a support table
Implementation Method 4
a laser light source for oscillating the laser light in a pulsating manner
Implementation Method 5
forming a modified region including a modified spot in an object to be processed by converging a laser light at the object
Data Source
AI summary
Laser light L is converged at an object to be processed 1, so as to form a modified region 7 including a modified spot S in the object 1. At this time, the laser light L is converged at a front face 3 of the object 1 while an aberration of the laser light L is corrected such as to locate a converging point of the laser light L near the front face 3 serving as a laser light entrance surface, so as to form a second modified spot S2 exposed at the front face 3 in the object 1.