Laser Machining Mirror Deformation Correction
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Solution Overview
Problem
Laser machining technologies face challenges in achieving high form accuracy and efficiency due to mirror deformation and mass trade-offs, which affect the circularity and energy distribution of laser beams, leading to poor hole quality.
Innovation Solution
The use of optical devices to correct curvature on the reflective faces of mirrors, ensuring converging positions align with the optical axis, and strategically placing cylindrical lenses to compensate for deformations, thereby maintaining beam circularity and energy distribution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If the thickness of mirrors is reduced to decrease mass, then positioning speed is improved, but form accuracy of reflective face deteriorates due to bending and distortion
Solution Approach 1:
The patent applies preliminary anti-action by introducing a corrective optical device that generates an opposite effect to counteract the deformation of the reflective face. The corrective device creates a deformation in the opposite direction to compensate for the bending and distortion caused by the thin mirror structure, thereby maintaining form accuracy while allowing the mirror to be thin for high positioning speed
Solution Approach 2:
The patent uses an intermediary corrective optical device as a mediator between the thin mirror and the laser beam. This intermediary device compensates for the deformation of the thin mirror by introducing an opposite deformation, allowing the thin mirror to maintain high positioning speed while the corrective device ensures the required form accuracy is achieved
2Productivity
If the thickness of mirrors is reduced to decrease mass, then productivity is improved, but hole quality deteriorates due to focal position deviation and beam mode deterioration
Solution Approach 1:
The corrective optical device applies preliminary anti-action by pre-compensating for the deformation effects before the laser beam interacts with the workpiece. By introducing an opposite deformation in the optical path, the device prevents focal position deviation and beam mode deterioration, ensuring high hole quality while maintaining high productivity through the use of thin, fast-positioning mirrors
Solution Approach 2:
The corrective optical device serves as an intermediary that mediates between the thin mirror's high-speed positioning capability and the requirement for high hole quality. It compensates for the deformation effects that would otherwise degrade beam quality and hole form accuracy, thereby enabling both high productivity and high precision machining
3Speed
If the thickness of mirrors is reduced to decrease mass, then positioning response is improved, but energy distribution uniformity deteriorates
Solution Approach 1:
The corrective optical device applies preliminary anti-action by introducing an opposite deformation that counteracts the non-uniform energy distribution caused by the thin mirror's deformation. This ensures uniform energy distribution across the beam while maintaining the fast positioning response enabled by the thin mirror structure
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for efficient machining of holes with improved form accuracy and reduced deformation-related issues, enhancing the overall quality of machined holes.
Implementation Method 1
providing a corrective optical device; the corrective optical device has a function of correcting curvature of the reflective face of the mirror
Implementation Method 2
a laser beam is positioned by an X mirror whose axis of rotation is in an X-direction and a Y mirror whose axis of rotation is in a Y-direction and made to enter a converging lens
Implementation Method 3
a work is machined with converged (focused) laser beam
Data Source
AI summary
A laser machining method and a laser machining apparatus by which holes excelling in form accuracy can be machined efficiently are to be provided. A first cylindrical lens and/or a second cylindrical lens to correct any deformation of reflective face of a first mirror and/or a second mirror is arranged on an optical axis of a laser beam, and converging positions of the laser beam for an X-component and for a Y-component are coincident with a point on the optical axis.


